Fabrication of AlN slender piezoelectric cantilevers for high-speed MEMS actuations

An T Tran, Gregory Pandraud, Hugo Schevellis, Tuncay Alan

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

6 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings of Eurosensors XXV September 4-7 2011 Athens Greece
EditorsChristos Tsamis
Place of PublicationNetherlands
PublisherElsevier
Pages673 - 676
Number of pages4
ISBN (Electronic)1877-7058
DOIs
Publication statusPublished - 2011
EventEuropean Conference on Solid-State Transducers (Eurosensors) 2011 - Megaron Athens International Conference Centre (Megaron AICC), Athens, Greece
Duration: 4 Sep 20117 Sep 2011
Conference number: 25th
http://www.eurosensors2011.org/

Conference

ConferenceEuropean Conference on Solid-State Transducers (Eurosensors) 2011
Abbreviated titleEurosensors 2011
CountryGreece
CityAthens
Period4/09/117/09/11
Internet address

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