Fabrication of AlN slender piezoelectric cantilevers for high-speed MEMS actuations

An T Tran, Gregory Pandraud, Hugo Schevellis, Tuncay Alan

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

6 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings of Eurosensors XXV September 4-7 2011 Athens Greece
EditorsChristos Tsamis
Place of PublicationNetherlands
PublisherElsevier
Pages673 - 676
Number of pages4
ISBN (Electronic)1877-7058
DOIs
Publication statusPublished - 2011
EventEuropean Conference on Solid-State Transducers (Eurosensors) 2011 - Megaron Athens International Conference Centre (Megaron AICC), Athens, Greece
Duration: 4 Sep 20117 Sep 2011
Conference number: 25th
http://www.eurosensors2011.org/

Conference

ConferenceEuropean Conference on Solid-State Transducers (Eurosensors) 2011
Abbreviated titleEurosensors 2011
CountryGreece
CityAthens
Period4/09/117/09/11
Internet address

Cite this

Tran, A. T., Pandraud, G., Schevellis, H., & Alan, T. (2011). Fabrication of AlN slender piezoelectric cantilevers for high-speed MEMS actuations. In C. Tsamis (Ed.), Proceedings of Eurosensors XXV September 4-7 2011 Athens Greece (pp. 673 - 676). Netherlands: Elsevier. https://doi.org/10.1016/j.proeng.2011.12.166
Tran, An T ; Pandraud, Gregory ; Schevellis, Hugo ; Alan, Tuncay. / Fabrication of AlN slender piezoelectric cantilevers for high-speed MEMS actuations. Proceedings of Eurosensors XXV September 4-7 2011 Athens Greece. editor / Christos Tsamis. Netherlands : Elsevier, 2011. pp. 673 - 676
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Tran, AT, Pandraud, G, Schevellis, H & Alan, T 2011, Fabrication of AlN slender piezoelectric cantilevers for high-speed MEMS actuations. in C Tsamis (ed.), Proceedings of Eurosensors XXV September 4-7 2011 Athens Greece. Elsevier, Netherlands, pp. 673 - 676, European Conference on Solid-State Transducers (Eurosensors) 2011, Athens, Greece, 4/09/11. https://doi.org/10.1016/j.proeng.2011.12.166

Fabrication of AlN slender piezoelectric cantilevers for high-speed MEMS actuations. / Tran, An T; Pandraud, Gregory; Schevellis, Hugo; Alan, Tuncay.

Proceedings of Eurosensors XXV September 4-7 2011 Athens Greece. ed. / Christos Tsamis. Netherlands : Elsevier, 2011. p. 673 - 676.

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

TY - GEN

T1 - Fabrication of AlN slender piezoelectric cantilevers for high-speed MEMS actuations

AU - Tran, An T

AU - Pandraud, Gregory

AU - Schevellis, Hugo

AU - Alan, Tuncay

PY - 2011

Y1 - 2011

UR - http://www.sciencedirect.com/science/article/pii/S1877705811058358

U2 - 10.1016/j.proeng.2011.12.166

DO - 10.1016/j.proeng.2011.12.166

M3 - Conference Paper

SP - 673

EP - 676

BT - Proceedings of Eurosensors XXV September 4-7 2011 Athens Greece

A2 - Tsamis, Christos

PB - Elsevier

CY - Netherlands

ER -

Tran AT, Pandraud G, Schevellis H, Alan T. Fabrication of AlN slender piezoelectric cantilevers for high-speed MEMS actuations. In Tsamis C, editor, Proceedings of Eurosensors XXV September 4-7 2011 Athens Greece. Netherlands: Elsevier. 2011. p. 673 - 676 https://doi.org/10.1016/j.proeng.2011.12.166