Fabrication and characterization of a novel nanoscale thermal anemometry probe

Margit Vallikivi, Alexander Smits

Research output: Contribution to journalArticleResearchpeer-review

42 Citations (Scopus)
Original languageEnglish
Pages (from-to)899 - 907
Number of pages9
JournalJournal of Microelectromechanical Systems
Volume23
Issue number4
DOIs
Publication statusPublished - 2014

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