Extraction of attenuation parameter in periodic shorted reflectors of one-port SAW resonator using scattering matrix approach

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Abstract

In this work, the well-known scattering matrix approach to the design of one-port surface acoustic wave (SAW) resonators is adapted toward extraction of the coupling-of-modes (COM) attenuation parameter, for Rayleigh SAW propagation on a periodic shorted aluminum grating. The attenuation close to resonance inside the reflectors of the one-port SAW resonator is extracted by matching the measured conductance of the resonator to its version calculated from the experimentally measured interdigital transducer (IDT) scattering coefficients, intrinsic substrate parameters, and geometry of the resonator. Based on the extracted value of, it was observed that the proposed method could predict the unloaded Q -factor of the resonator at a minor discrepancy of 7.02%. At the same time, since the proposed method utilizes the measured IDT scattering coefficients to consider the effect of IDT losses on the measured conductance of the resonator, it offers a convenient scheme to directly extract the attenuation of SAW contributed by the reflectors of the device through numerical means while operating purely in the frequency domain. The proposed method could be applied to quantify the increase in attenuation caused by viscous damping of SAW inside sensing film-coated reflectors of one-port SAW resonator sensors, and thereby, aid to optimize the sensing film thickness to deploy these devices for high-resolution frequency-based sensing applications.

Original languageEnglish
Article number6500404
Number of pages4
JournalIEEE Transactions on Instrumentation and Measurement
Volume72
DOIs
Publication statusPublished - 2023

Keywords

  • One-port surface acoustic wave (SAW) resonator
  • SAW grating attenuation measurement
  • surface acoustic waves

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