Experimental study of laser interferometry based motion tracking of a flexure-based mechanism

Umesh Bhagat, Bijan Shirinzadeh, Yanling Tian

Research output: Chapter in Book/Report/Conference proceedingChapter (Book)Otherpeer-review


This paper presents an experimental study of laser interferometry-based closed-loop motion tracking for flexure-based four-bar micro/nano manipulator. To enhance the accuracy of micro/nano manipulation, laser interferometry-based motion tracking control is established with experimental facility. The authors present and discuss open-loop control, model-based closed-loop control, and robust motion tracking closed-loop control for flexure-based mechanism. A comparative error analysis for closed-loop control with capacitive position sensor and laser interferometry feedback is discussed and presented. Modelbased closed-loop control shows improvement in position and motion tracking over open-loop control. Robust control demonstrates high precise and accurate motion tracking of flexure-based mechanism compared to the model-based control. With this experimental study, this paper offers evidence that the laser interferometry-based closed-loop control can minimize positioning and tracking errors during dynamic motion, hence realizing high precision motion tracking and accurate position control.

Original languageEnglish
Title of host publicationAdvanced Engineering and Computational Methodologies for Intelligent Mechatronics and Robotics
EditorsShahin Sirouspour
Place of PublicationHershey PA USA
PublisherIGI Global
Number of pages14
ISBN (Electronic)9781466636354
ISBN (Print)9781466636347
Publication statusPublished - 31 Mar 2013

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