Experimental analysis of laser interferometry-based robust motion tracking control of a flexure-based mechanism

Umesh Krishna Bhagat, Bijan Shirinzadeh, Yanling Tian, Dawei Zhang

Research output: Contribution to journalArticleResearchpeer-review

44 Citations (Scopus)
Original languageEnglish
Pages (from-to)267 - 275
Number of pages9
JournalIEEE Transactions on Automation Science and Engineering
Issue number2
Publication statusPublished - 2013

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