Error analysis of laser interferometry based sensing and measurement technique used in micro/nano manipulation

Umesh Bhagat; Bijan Shirinzadeh

Error analysis of laser interferometry based sensing and measurement technique used in micro/nano manipulation

Mechanical & Aerospace Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

Original language	English
Title of host publication	Proceedings of the Seventh International Conference on Precision, Meso, Micro and Nano Engineering
Editors	S K Basu, B B Ahuja, P P Chikate
Place of Publication	New Delhi India
Publisher	Excel India Publishers
Pages	45 - 49
Number of pages	5
Volume	1
ISBN (Print)	9789381361634
Publication status	Published - 2011
Event	International Conference on Precision, Meso, Micro and Nano Engineering (COPEN 2011) - College of Engineering, Pune, India Duration: 10 Dec 2011 → 11 Dec 2011 https://www.scribd.com/document/57164177/COPEN-17-1-2011

Conference

Conference	International Conference on Precision, Meso, Micro and Nano Engineering (COPEN 2011)
Abbreviated title	COPEN-7
Country/Territory	India
City	Pune
Period	10/12/11 → 11/12/11
Internet address	https://www.scribd.com/document/57164177/COPEN-17-1-2011

Cite this

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title = "Error analysis of laser interferometry based sensing and measurement technique used in micro/nano manipulation",

author = "Umesh Bhagat and Bijan Shirinzadeh",

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booktitle = "Proceedings of the Seventh International Conference on Precision, Meso, Micro and Nano Engineering",

publisher = "Excel India Publishers",

note = "International Conference on Precision, Meso, Micro and Nano Engineering (COPEN 2011), COPEN-7 ; Conference date: 10-12-2011 Through 11-12-2011",

url = "https://www.scribd.com/document/57164177/COPEN-17-1-2011",

}

Bhagat, U & Shirinzadeh, B 2011, Error analysis of laser interferometry based sensing and measurement technique used in micro/nano manipulation. in SK Basu, BB Ahuja & PP Chikate (eds), Proceedings of the Seventh International Conference on Precision, Meso, Micro and Nano Engineering. vol. 1, Excel India Publishers, New Delhi India, pp. 45 - 49, International Conference on Precision, Meso, Micro and Nano Engineering (COPEN 2011), Pune, India, 10/12/11.

Error analysis of laser interferometry based sensing and measurement technique used in micro/nano manipulation. / Bhagat, Umesh; Shirinzadeh, Bijan.
Proceedings of the Seventh International Conference on Precision, Meso, Micro and Nano Engineering. ed. / S K Basu; B B Ahuja; P P Chikate. Vol. 1 New Delhi India: Excel India Publishers, 2011. p. 45 - 49.

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

TY - GEN

T1 - Error analysis of laser interferometry based sensing and measurement technique used in micro/nano manipulation

AU - Bhagat, Umesh

AU - Shirinzadeh, Bijan

PY - 2011

Y1 - 2011

UR - http://www.excelpublish.com/

M3 - Conference Paper

SN - 9789381361634

VL - 1

SP - 45

EP - 49

BT - Proceedings of the Seventh International Conference on Precision, Meso, Micro and Nano Engineering

A2 - Basu, S K

A2 - Ahuja, B B

A2 - Chikate, P P

PB - Excel India Publishers

CY - New Delhi India

T2 - International Conference on Precision, Meso, Micro and Nano Engineering (COPEN 2011)

Y2 - 10 December 2011 through 11 December 2011

ER -

Error analysis of laser interferometry based sensing and measurement technique used in micro/nano manipulation

Conference

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