Error analysis of laser interferometry based sensing and measurement technique used in micro/nano manipulation

Umesh Bhagat, Bijan Shirinzadeh

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

Original languageEnglish
Title of host publicationProceedings of the Seventh International Conference on Precision, Meso, Micro and Nano Engineering
EditorsS K Basu, B B Ahuja, P P Chikate
Place of PublicationNew Delhi India
PublisherExcel India Publishers
Pages45 - 49
Number of pages5
Volume1
ISBN (Print)9789381361634
Publication statusPublished - 2011
EventInternational Conference on Precision, Meso, Micro and Nano Engineering (COPEN 2011) - College of Engineering, Pune, India
Duration: 10 Dec 201111 Dec 2011
https://www.scribd.com/document/57164177/COPEN-17-1-2011

Conference

ConferenceInternational Conference on Precision, Meso, Micro and Nano Engineering (COPEN 2011)
Abbreviated titleCOPEN-7
CountryIndia
CityPune
Period10/12/1111/12/11
Internet address

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