Error analysis of laser interferometry based sensing and measurement technique used in micro/nano manipulation

Umesh Bhagat, Bijan Shirinzadeh

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

Original languageEnglish
Title of host publicationProceedings of the Seventh International Conference on Precision, Meso, Micro and Nano Engineering
EditorsS K Basu, B B Ahuja, P P Chikate
Place of PublicationNew Delhi India
PublisherExcel India Publishers
Pages45 - 49
Number of pages5
Volume1
ISBN (Print)9789381361634
Publication statusPublished - 2011
EventInternational Conference on Precision, Meso, Micro and Nano Engineering (COPEN 2011) - College of Engineering, Pune, India
Duration: 10 Dec 201111 Dec 2011
https://www.scribd.com/document/57164177/COPEN-17-1-2011

Conference

ConferenceInternational Conference on Precision, Meso, Micro and Nano Engineering (COPEN 2011)
Abbreviated titleCOPEN-7
CountryIndia
CityPune
Period10/12/1111/12/11
Internet address

Cite this

Bhagat, U., & Shirinzadeh, B. (2011). Error analysis of laser interferometry based sensing and measurement technique used in micro/nano manipulation. In S. K. Basu, B. B. Ahuja, & P. P. Chikate (Eds.), Proceedings of the Seventh International Conference on Precision, Meso, Micro and Nano Engineering (Vol. 1, pp. 45 - 49). New Delhi India: Excel India Publishers.
Bhagat, Umesh ; Shirinzadeh, Bijan. / Error analysis of laser interferometry based sensing and measurement technique used in micro/nano manipulation. Proceedings of the Seventh International Conference on Precision, Meso, Micro and Nano Engineering. editor / S K Basu ; B B Ahuja ; P P Chikate. Vol. 1 New Delhi India : Excel India Publishers, 2011. pp. 45 - 49
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booktitle = "Proceedings of the Seventh International Conference on Precision, Meso, Micro and Nano Engineering",
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Bhagat, U & Shirinzadeh, B 2011, Error analysis of laser interferometry based sensing and measurement technique used in micro/nano manipulation. in SK Basu, BB Ahuja & PP Chikate (eds), Proceedings of the Seventh International Conference on Precision, Meso, Micro and Nano Engineering. vol. 1, Excel India Publishers, New Delhi India, pp. 45 - 49, International Conference on Precision, Meso, Micro and Nano Engineering (COPEN 2011), Pune, India, 10/12/11.

Error analysis of laser interferometry based sensing and measurement technique used in micro/nano manipulation. / Bhagat, Umesh; Shirinzadeh, Bijan.

Proceedings of the Seventh International Conference on Precision, Meso, Micro and Nano Engineering. ed. / S K Basu; B B Ahuja; P P Chikate. Vol. 1 New Delhi India : Excel India Publishers, 2011. p. 45 - 49.

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

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T1 - Error analysis of laser interferometry based sensing and measurement technique used in micro/nano manipulation

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PY - 2011

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M3 - Conference Paper

SN - 9789381361634

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BT - Proceedings of the Seventh International Conference on Precision, Meso, Micro and Nano Engineering

A2 - Basu, S K

A2 - Ahuja, B B

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Bhagat U, Shirinzadeh B. Error analysis of laser interferometry based sensing and measurement technique used in micro/nano manipulation. In Basu SK, Ahuja BB, Chikate PP, editors, Proceedings of the Seventh International Conference on Precision, Meso, Micro and Nano Engineering. Vol. 1. New Delhi India: Excel India Publishers. 2011. p. 45 - 49