Abstract
We demonstrate absolute scale agreement between the number of X-ray counts in energy dispersive X-ray spectroscopy using an atomic-scale coherent electron probe and first-principles simulations. Scan-averaged spectra were collected across a range of thicknesses with precisely determined and controlled microscope parameters. Ionization cross-sections were calculated using the quantum excitation of phonons model, incorporating dynamical (multiple) electron scattering, which is seen to be important even for very thin specimens.
Original language | English |
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Pages (from-to) | 21-26 |
Number of pages | 6 |
Journal | Ultramicroscopy |
Volume | 157 |
DOIs | |
Publication status | Published - 2015 |
Keywords
- Scanning transmissionelectronmicroscopy (STEM)
- Energy dispersiveX-ray(EDX)spectroscopy
Equipment
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Centre for Electron Microscopy (MCEM)
Peter Miller (Manager)
Office of the Vice-Provost (Research and Research Infrastructure)Facility/equipment: Facility