Energy dispersive X-ray analysis on an absolute scale in scanning transmission electron microscopy

Zhen Chen; Adrian John D'Alfonso; Matthew Weyland; Daniel Joel Taplin; Leslie J Allen; Scott Findlay

doi:10.1016/j.ultramic.2015.05.010

Energy dispersive X-ray analysis on an absolute scale in scanning transmission electron microscopy

Zhen Chen, Adrian John D'Alfonso, Matthew Weyland, Daniel Joel Taplin, Leslie J Allen, Scott Findlay

Research output: Contribution to journal › Article › Research › peer-review

27 Citations (Scopus)

Abstract

We demonstrate absolute scale agreement between the number of X-ray counts in energy dispersive X-ray spectroscopy using an atomic-scale coherent electron probe and first-principles simulations. Scan-averaged spectra were collected across a range of thicknesses with precisely determined and controlled microscope parameters. Ionization cross-sections were calculated using the quantum excitation of phonons model, incorporating dynamical (multiple) electron scattering, which is seen to be important even for very thin specimens.

Original language	English
Pages (from-to)	21-26
Number of pages	6
Journal	Ultramicroscopy
Volume	157
DOIs	https://doi.org/10.1016/j.ultramic.2015.05.010
Publication status	Published - 2015

Keywords

Scanning transmissionelectronmicroscopy (STEM)
Energy dispersiveX-ray(EDX)spectroscopy

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10.1016/j.ultramic.2015.05.010

3495943-oaAccepted author manuscript, 3.32 MBLicence: CC BY-NC-ND

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Centre for Electron Microscopy (MCEM)
Peter Miller (Manager)
Office of the Vice-Provost (Research and Research Infrastructure)
Facility/equipment: Facility

Cite this

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title = "Energy dispersive X-ray analysis on an absolute scale in scanning transmission electron microscopy",

abstract = "We demonstrate absolute scale agreement between the number of X-ray counts in energy dispersive X-ray spectroscopy using an atomic-scale coherent electron probe and first-principles simulations. Scan-averaged spectra were collected across a range of thicknesses with precisely determined and controlled microscope parameters. Ionization cross-sections were calculated using the quantum excitation of phonons model, incorporating dynamical (multiple) electron scattering, which is seen to be important even for very thin specimens.",

keywords = "Scanning transmissionelectronmicroscopy (STEM), Energy dispersiveX-ray(EDX)spectroscopy",

author = "Zhen Chen and D'Alfonso, {Adrian John} and Matthew Weyland and Taplin, {Daniel Joel} and Allen, {Leslie J} and Scott Findlay",

year = "2015",

doi = "10.1016/j.ultramic.2015.05.010",

language = "English",

volume = "157",

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journal = "Ultramicroscopy",

issn = "0304-3991",

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T1 - Energy dispersive X-ray analysis on an absolute scale in scanning transmission electron microscopy

AU - Chen, Zhen

AU - D'Alfonso, Adrian John

AU - Weyland, Matthew

AU - Taplin, Daniel Joel

AU - Allen, Leslie J

AU - Findlay, Scott

PY - 2015

Y1 - 2015

N2 - We demonstrate absolute scale agreement between the number of X-ray counts in energy dispersive X-ray spectroscopy using an atomic-scale coherent electron probe and first-principles simulations. Scan-averaged spectra were collected across a range of thicknesses with precisely determined and controlled microscope parameters. Ionization cross-sections were calculated using the quantum excitation of phonons model, incorporating dynamical (multiple) electron scattering, which is seen to be important even for very thin specimens.

AB - We demonstrate absolute scale agreement between the number of X-ray counts in energy dispersive X-ray spectroscopy using an atomic-scale coherent electron probe and first-principles simulations. Scan-averaged spectra were collected across a range of thicknesses with precisely determined and controlled microscope parameters. Ionization cross-sections were calculated using the quantum excitation of phonons model, incorporating dynamical (multiple) electron scattering, which is seen to be important even for very thin specimens.

KW - Scanning transmissionelectronmicroscopy (STEM)

KW - Energy dispersiveX-ray(EDX)spectroscopy

UR - http://goo.gl/zrVnHf

U2 - 10.1016/j.ultramic.2015.05.010

DO - 10.1016/j.ultramic.2015.05.010

M3 - Article

VL - 157

SP - 21

EP - 26

JO - Ultramicroscopy

JF - Ultramicroscopy

SN - 0304-3991

ER -

Energy dispersive X-ray analysis on an absolute scale in scanning transmission electron microscopy

Abstract

Keywords

Access to Document

Centre for Electron Microscopy (MCEM)

Cite this