Abstract
| Original language | English |
|---|---|
| Pages (from-to) | 21-26 |
| Number of pages | 6 |
| Journal | Ultramicroscopy |
| Volume | 157 |
| DOIs | |
| Publication status | Published - 2015 |
Keywords
- Scanning transmissionelectronmicroscopy (STEM)
- Energy dispersiveX-ray(EDX)spectroscopy
Cite this
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Energy dispersive X-ray analysis on an absolute scale in scanning transmission electron microscopy. / Chen, Zhen; D'Alfonso, Adrian John; Weyland, Matthew; Taplin, Daniel Joel; Allen, Leslie J; Findlay, Scott.
In: Ultramicroscopy, Vol. 157, 2015, p. 21-26.Research output: Contribution to journal › Article › Research › peer-review
TY - JOUR
T1 - Energy dispersive X-ray analysis on an absolute scale in scanning transmission electron microscopy
AU - Chen, Zhen
AU - D'Alfonso, Adrian John
AU - Weyland, Matthew
AU - Taplin, Daniel Joel
AU - Allen, Leslie J
AU - Findlay, Scott
PY - 2015
Y1 - 2015
N2 - We demonstrate absolute scale agreement between the number of X-ray counts in energy dispersive X-ray spectroscopy using an atomic-scale coherent electron probe and first-principles simulations. Scan-averaged spectra were collected across a range of thicknesses with precisely determined and controlled microscope parameters. Ionization cross-sections were calculated using the quantum excitation of phonons model, incorporating dynamical (multiple) electron scattering, which is seen to be important even for very thin specimens.
AB - We demonstrate absolute scale agreement between the number of X-ray counts in energy dispersive X-ray spectroscopy using an atomic-scale coherent electron probe and first-principles simulations. Scan-averaged spectra were collected across a range of thicknesses with precisely determined and controlled microscope parameters. Ionization cross-sections were calculated using the quantum excitation of phonons model, incorporating dynamical (multiple) electron scattering, which is seen to be important even for very thin specimens.
KW - Scanning transmissionelectronmicroscopy (STEM)
KW - Energy dispersiveX-ray(EDX)spectroscopy
UR - http://goo.gl/zrVnHf
U2 - 10.1016/j.ultramic.2015.05.010
DO - 10.1016/j.ultramic.2015.05.010
M3 - Article
VL - 157
SP - 21
EP - 26
JO - Ultramicroscopy
JF - Ultramicroscopy
SN - 0304-3991
ER -