Energy dispersive X-ray analysis on an absolute scale in scanning transmission electron microscopy

Zhen Chen, Adrian John D'Alfonso, Matthew Weyland, Daniel Joel Taplin, Leslie J Allen, Scott Findlay

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27 Citations (Scopus)

Abstract

We demonstrate absolute scale agreement between the number of X-ray counts in energy dispersive X-ray spectroscopy using an atomic-scale coherent electron probe and first-principles simulations. Scan-averaged spectra were collected across a range of thicknesses with precisely determined and controlled microscope parameters. Ionization cross-sections were calculated using the quantum excitation of phonons model, incorporating dynamical (multiple) electron scattering, which is seen to be important even for very thin specimens.
Original languageEnglish
Pages (from-to)21-26
Number of pages6
JournalUltramicroscopy
Volume157
DOIs
Publication statusPublished - 2015

Keywords

  • Scanning transmissionelectronmicroscopy (STEM)
  • Energy dispersiveX-ray(EDX)spectroscopy

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