Energy dispersive X-ray analysis on an absolute scale in scanning transmission electron microscopy

Zhen Chen, Adrian John D'Alfonso, Matthew Weyland, Daniel Joel Taplin, Leslie J Allen, Scott Findlay

Research output: Contribution to journalArticleResearchpeer-review

Abstract

We demonstrate absolute scale agreement between the number of X-ray counts in energy dispersive X-ray spectroscopy using an atomic-scale coherent electron probe and first-principles simulations. Scan-averaged spectra were collected across a range of thicknesses with precisely determined and controlled microscope parameters. Ionization cross-sections were calculated using the quantum excitation of phonons model, incorporating dynamical (multiple) electron scattering, which is seen to be important even for very thin specimens.
Original languageEnglish
Pages (from-to)21-26
Number of pages6
JournalUltramicroscopy
Volume157
DOIs
Publication statusPublished - 2015

Keywords

  • Scanning transmissionelectronmicroscopy (STEM)
  • Energy dispersiveX-ray(EDX)spectroscopy

Cite this

Chen, Zhen ; D'Alfonso, Adrian John ; Weyland, Matthew ; Taplin, Daniel Joel ; Allen, Leslie J ; Findlay, Scott. / Energy dispersive X-ray analysis on an absolute scale in scanning transmission electron microscopy. In: Ultramicroscopy. 2015 ; Vol. 157. pp. 21-26.
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keywords = "Scanning transmissionelectronmicroscopy (STEM), Energy dispersiveX-ray(EDX)spectroscopy",
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Energy dispersive X-ray analysis on an absolute scale in scanning transmission electron microscopy. / Chen, Zhen; D'Alfonso, Adrian John; Weyland, Matthew; Taplin, Daniel Joel; Allen, Leslie J; Findlay, Scott.

In: Ultramicroscopy, Vol. 157, 2015, p. 21-26.

Research output: Contribution to journalArticleResearchpeer-review

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AU - Chen, Zhen

AU - D'Alfonso, Adrian John

AU - Weyland, Matthew

AU - Taplin, Daniel Joel

AU - Allen, Leslie J

AU - Findlay, Scott

PY - 2015

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AB - We demonstrate absolute scale agreement between the number of X-ray counts in energy dispersive X-ray spectroscopy using an atomic-scale coherent electron probe and first-principles simulations. Scan-averaged spectra were collected across a range of thicknesses with precisely determined and controlled microscope parameters. Ionization cross-sections were calculated using the quantum excitation of phonons model, incorporating dynamical (multiple) electron scattering, which is seen to be important even for very thin specimens.

KW - Scanning transmissionelectronmicroscopy (STEM)

KW - Energy dispersiveX-ray(EDX)spectroscopy

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U2 - 10.1016/j.ultramic.2015.05.010

DO - 10.1016/j.ultramic.2015.05.010

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