Energy dispersive X-ray analysis on an absolute scale in scanning transmission electron microscopy

Zhen Chen; Adrian John D'Alfonso; Matthew Weyland; Daniel Joel Taplin; Leslie J Allen; Scott Findlay

doi:10.1016/j.ultramic.2015.05.010

Energy dispersive X-ray analysis on an absolute scale in scanning transmission electron microscopy

Zhen Chen, Adrian John D'Alfonso, Matthew Weyland, Daniel Joel Taplin, Leslie J Allen, Scott Findlay

Research output: Contribution to journal › Article › Research › peer-review

26 Citations (Scopus)

Abstract

We demonstrate absolute scale agreement between the number of X-ray counts in energy dispersive X-ray spectroscopy using an atomic-scale coherent electron probe and first-principles simulations. Scan-averaged spectra were collected across a range of thicknesses with precisely determined and controlled microscope parameters. Ionization cross-sections were calculated using the quantum excitation of phonons model, incorporating dynamical (multiple) electron scattering, which is seen to be important even for very thin specimens.

Original language	English
Pages (from-to)	21-26
Number of pages	6
Journal	Ultramicroscopy
Volume	157
DOIs	https://doi.org/10.1016/j.ultramic.2015.05.010
Publication status	Published - 2015

Keywords

Scanning transmissionelectronmicroscopy (STEM)
Energy dispersiveX-ray(EDX)spectroscopy

Cite this

Chen, Z., D'Alfonso, A. J., Weyland, M., Taplin, D. J., Allen, L. J., & Findlay, S. (2015). Energy dispersive X-ray analysis on an absolute scale in scanning transmission electron microscopy. Ultramicroscopy, 157, 21-26. https://doi.org/10.1016/j.ultramic.2015.05.010

Chen, Zhen ; D'Alfonso, Adrian John ; Weyland, Matthew ; Taplin, Daniel Joel ; Allen, Leslie J ; Findlay, Scott. / Energy dispersive X-ray analysis on an absolute scale in scanning transmission electron microscopy. In: Ultramicroscopy. 2015 ; Vol. 157. pp. 21-26.

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Chen, Z, D'Alfonso, AJ, Weyland, M, Taplin, DJ, Allen, LJ & Findlay, S 2015, 'Energy dispersive X-ray analysis on an absolute scale in scanning transmission electron microscopy', Ultramicroscopy, vol. 157, pp. 21-26. https://doi.org/10.1016/j.ultramic.2015.05.010

Energy dispersive X-ray analysis on an absolute scale in scanning transmission electron microscopy. / Chen, Zhen; D'Alfonso, Adrian John; Weyland, Matthew; Taplin, Daniel Joel; Allen, Leslie J; Findlay, Scott.

In: Ultramicroscopy, Vol. 157, 2015, p. 21-26.

Research output: Contribution to journal › Article › Research › peer-review

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AU - Findlay, Scott

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