Electrostatic actuators for misalignment comp

Prasanna Srinivasan, Carsten Gollasch, Michael Kraft

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

Original language	English
Title of host publication	Proceedings of Eurosensors XXIII Conference
Editors	Juergen Brugger, Danick Briand
Place of Publication	Netherlands
Publisher	Elsevier
Pages	1 - 4
Number of pages	4
DOIs	https://doi.org/10.1016/j.proche.2009.07.101
Publication status	Published - 2009
Externally published	Yes
Event	European Conference on Solid-State Transducers (Eurosensors) 2009 - Palais de Beaulieu and EPFL, Lausanne, Switzerland Duration: 6 Sept 2009 → 9 Sept 2009

Conference	European Conference on Solid-State Transducers (Eurosensors) 2009
Abbreviated title	Eurosensors 2009
Country/Territory	Switzerland
City	Lausanne
Period	6/09/09 → 9/09/09

Access to Document

@inproceedings{dad5e6d75fbe4913827917b52ff51662,

title = "Electrostatic actuators for misalignment comp",

author = "Prasanna Srinivasan and Carsten Gollasch and Michael Kraft",

year = "2009",

doi = "10.1016/j.proche.2009.07.101",

language = "English",

pages = "1 -- 4",

editor = "Juergen Brugger and Danick Briand",

booktitle = "Proceedings of Eurosensors XXIII Conference",

publisher = "Elsevier",

address = "Netherlands",

note = "European Conference on Solid-State Transducers (Eurosensors) 2009, Eurosensors 2009 ; Conference date: 06-09-2009 Through 09-09-2009",

}

TY - GEN

T1 - Electrostatic actuators for misalignment comp

AU - Srinivasan, Prasanna

AU - Gollasch, Carsten

AU - Kraft, Michael

PY - 2009

Y1 - 2009

U2 - 10.1016/j.proche.2009.07.101

DO - 10.1016/j.proche.2009.07.101

M3 - Conference Paper

SP - 1

EP - 4

BT - Proceedings of Eurosensors XXIII Conference

A2 - Brugger, Juergen

A2 - Briand, Danick

PB - Elsevier

CY - Netherlands

T2 - European Conference on Solid-State Transducers (Eurosensors) 2009

Y2 - 6 September 2009 through 9 September 2009

ER -