Electrostatic actuators for misalignment comp

Prasanna Srinivasan, Carsten Gollasch, Michael Kraft

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

Original languageEnglish
Title of host publicationProceedings of Eurosensors XXIII Conference
EditorsJuergen Brugger, Danick Briand
Place of PublicationNetherlands
PublisherElsevier
Pages1 - 4
Number of pages4
ISBN (Electronic)1876-6196
DOIs
Publication statusPublished - 2009
Externally publishedYes
EventEuropean Conference on Solid-State Transducers (Eurosensors) 2009 - Palais de Beaulieu and EPFL, Lausanne, Switzerland
Duration: 6 Sep 20099 Sep 2009

Conference

ConferenceEuropean Conference on Solid-State Transducers (Eurosensors) 2009
Abbreviated titleEurosensors 2009
CountrySwitzerland
CityLausanne
Period6/09/099/09/09

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