@inproceedings{dad5e6d75fbe4913827917b52ff51662,
title = "Electrostatic actuators for misalignment comp",
author = "Prasanna Srinivasan and Carsten Gollasch and Michael Kraft",
year = "2009",
doi = "10.1016/j.proche.2009.07.101",
language = "English",
pages = "1 -- 4",
editor = "Juergen Brugger and Danick Briand",
booktitle = "Proceedings of Eurosensors XXIII Conference",
publisher = "Elsevier",
address = "Netherlands",
note = "European Conference on Solid-State Transducers (Eurosensors) 2009, Eurosensors 2009 ; Conference date: 06-09-2009 Through 09-09-2009",
}