Electron caustic lithography

Shane Michael Kennedy; Changxi Zheng; Jing Fu; Wen-Xin Tang; David Paganin; David Jesson

doi:10.1063/1.4730139

Electron caustic lithography

Shane Michael Kennedy, Changxi Zheng, Jing Fu, Wen-Xin Tang, David Paganin, David Jesson

Mechanical & Aerospace Engineering

Research output: Contribution to journal › Article › Research › peer-review

Original language	English
Pages (from-to)	1 - 6
Number of pages	6
Journal	AIP Advances
Volume	2
Issue number	2
DOIs	https://doi.org/10.1063/1.4730139
Publication status	Published - 2012

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10.1063/1.4730139

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AU - Paganin, David

AU - Jesson, David

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Electron caustic lithography

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