Electron caustic lithography

Shane Michael Kennedy; Changxi Zheng; Jing Fu; Wen-Xin Tang; David Paganin; David Jesson

doi:10.1063/1.4730139

Electron caustic lithography

Shane Michael Kennedy, Changxi Zheng, Jing Fu, Wen-Xin Tang, David Paganin, David Jesson

Mechanical & Aerospace Engineering

Research output: Contribution to journal › Article › Research › peer-review

Original language	English
Pages (from-to)	1 - 6
Number of pages	6
Journal	AIP Advances
Volume	2
Issue number	2
DOIs	https://doi.org/10.1063/1.4730139
Publication status	Published - 2012

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10.1063/1.4730139

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Cite this

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title = "Electron caustic lithography",

author = "Kennedy, {Shane Michael} and Changxi Zheng and Jing Fu and Wen-Xin Tang and David Paganin and David Jesson",

year = "2012",

doi = "10.1063/1.4730139",

language = "English",

volume = "2",

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journal = "AIP Advances",

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publisher = "The Royal Society of Chemistry",

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AU - Zheng, Changxi

AU - Fu, Jing

AU - Tang, Wen-Xin

AU - Paganin, David

AU - Jesson, David

PY - 2012

Y1 - 2012

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