Electron-beam induced diamond-like-carbon passivation of plasmonic devices

Eugeniu Balaur; Catherine Sadatnajafi; Daniel Langley; Jiao Lin; Shan Shan Kou; Brian Abbey

doi:10.1117/12.2202567

Electron-beam induced diamond-like-carbon passivation of plasmonic devices

Eugeniu Balaur
, Catherine Sadatnajafi
, Daniel Langley
, Jiao Lin
, Shan Shan Kou
, Brian Abbey

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

2 Citations (Scopus)

Abstract

Engineered materials with feature sizes on the order of a few nanometres offer the potential for producing metamaterials with properties which may differ significantly from their bulk counterpart. Here we describe the production of plasmonic colour filters using periodic arrays of nanoscale cross shaped apertures fabricated in optically opaque silver films. Due to its relatively low loss in the visible and near infrared range, silver is a popular choice for plasmonic devices, however it is also unstable in wet or even ambient conditions. Here we show that ultra-thin layers of Diamond-Like Carbon (DLC) can be used to prevent degradation due to oxidative stress, ageing and corrosion. We demonstrate that DLC effectively protects the sub-micron features which make up the plasmonic colour filter under both atmospheric conditions and accelerated aging using iodine gas. Through a systematic study we confirm that the nanometre thick DLC layers have no effect on the device functionality or performance.

Original language	English
Title of host publication	Micro+Nano Materials, Devices, and Systems
Editors	Stefano Palomba, Benjamin J. Eggleton
Publisher	SPIE - International Society for Optical Engineering
ISBN (Electronic)	9781628418903
DOIs	https://doi.org/10.1117/12.2202567
Publication status	Published - 2015
Externally published	Yes
Event	SPIE Micro+Nano Materials, Devices, and Applications Symposium 2015 - The University of Sydney, Sydney, Australia Duration: 6 Dec 2015 → 9 Dec 2015 http://spie.org/conferences-and-exhibitions/micronano-materials-devices-and-applications?SSO=1

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	9668
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	SPIE Micro+Nano Materials, Devices, and Applications Symposium 2015
Country/Territory	Australia
City	Sydney
Period	6/12/15 → 9/12/15
Internet address	http://spie.org/conferences-and-exhibitions/micronano-materials-devices-and-applications?SSO=1

Keywords

Colour Filters
Diamond-Like Carbon
Oxidation
Plasmonic Devices
Protective Coatings
Surface Plasmon Polaritons

Access to Document

10.1117/12.2202567

Cite this

Balaur, E., Sadatnajafi, C., Langley, D., Lin, J., Kou, S. S., & Abbey, B. (2015). Electron-beam induced diamond-like-carbon passivation of plasmonic devices. In S. Palomba, & B. J. Eggleton (Eds.), Micro+Nano Materials, Devices, and Systems Article 966817 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9668). SPIE - International Society for Optical Engineering. https://doi.org/10.1117/12.2202567

Balaur, Eugeniu ; Sadatnajafi, Catherine ; Langley, Daniel et al. / Electron-beam induced diamond-like-carbon passivation of plasmonic devices. Micro+Nano Materials, Devices, and Systems. editor / Stefano Palomba ; Benjamin J. Eggleton. SPIE - International Society for Optical Engineering, 2015. (Proceedings of SPIE - The International Society for Optical Engineering).

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title = "Electron-beam induced diamond-like-carbon passivation of plasmonic devices",

abstract = "Engineered materials with feature sizes on the order of a few nanometres offer the potential for producing metamaterials with properties which may differ significantly from their bulk counterpart. Here we describe the production of plasmonic colour filters using periodic arrays of nanoscale cross shaped apertures fabricated in optically opaque silver films. Due to its relatively low loss in the visible and near infrared range, silver is a popular choice for plasmonic devices, however it is also unstable in wet or even ambient conditions. Here we show that ultra-thin layers of Diamond-Like Carbon (DLC) can be used to prevent degradation due to oxidative stress, ageing and corrosion. We demonstrate that DLC effectively protects the sub-micron features which make up the plasmonic colour filter under both atmospheric conditions and accelerated aging using iodine gas. Through a systematic study we confirm that the nanometre thick DLC layers have no effect on the device functionality or performance.",

keywords = "Colour Filters, Diamond-Like Carbon, Oxidation, Plasmonic Devices, Protective Coatings, Surface Plasmon Polaritons",

author = "Eugeniu Balaur and Catherine Sadatnajafi and Daniel Langley and Jiao Lin and Kou, \{Shan Shan\} and Brian Abbey",

note = "Publisher Copyright: {\textcopyright} 2015 SPIE.; SPIE Micro+Nano Materials, Devices, and Applications Symposium 2015 ; Conference date: 06-12-2015 Through 09-12-2015",

year = "2015",

doi = "10.1117/12.2202567",

language = "English",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "SPIE - International Society for Optical Engineering",

editor = "Stefano Palomba and Eggleton, \{Benjamin J.\}",

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Balaur, E, Sadatnajafi, C, Langley, D, Lin, J, Kou, SS & Abbey, B 2015, Electron-beam induced diamond-like-carbon passivation of plasmonic devices. in S Palomba & BJ Eggleton (eds), Micro+Nano Materials, Devices, and Systems., 966817, Proceedings of SPIE - The International Society for Optical Engineering, vol. 9668, SPIE - International Society for Optical Engineering, SPIE Micro+Nano Materials, Devices, and Applications Symposium 2015, Sydney, New South Wales, Australia, 6/12/15. https://doi.org/10.1117/12.2202567

Electron-beam induced diamond-like-carbon passivation of plasmonic devices. / Balaur, Eugeniu; Sadatnajafi, Catherine; Langley, Daniel et al.
Micro+Nano Materials, Devices, and Systems. ed. / Stefano Palomba; Benjamin J. Eggleton. SPIE - International Society for Optical Engineering, 2015. 966817 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9668).

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

TY - GEN

T1 - Electron-beam induced diamond-like-carbon passivation of plasmonic devices

AU - Balaur, Eugeniu

AU - Sadatnajafi, Catherine

AU - Langley, Daniel

AU - Lin, Jiao

AU - Kou, Shan Shan

AU - Abbey, Brian

PY - 2015

Y1 - 2015

N2 - Engineered materials with feature sizes on the order of a few nanometres offer the potential for producing metamaterials with properties which may differ significantly from their bulk counterpart. Here we describe the production of plasmonic colour filters using periodic arrays of nanoscale cross shaped apertures fabricated in optically opaque silver films. Due to its relatively low loss in the visible and near infrared range, silver is a popular choice for plasmonic devices, however it is also unstable in wet or even ambient conditions. Here we show that ultra-thin layers of Diamond-Like Carbon (DLC) can be used to prevent degradation due to oxidative stress, ageing and corrosion. We demonstrate that DLC effectively protects the sub-micron features which make up the plasmonic colour filter under both atmospheric conditions and accelerated aging using iodine gas. Through a systematic study we confirm that the nanometre thick DLC layers have no effect on the device functionality or performance.

AB - Engineered materials with feature sizes on the order of a few nanometres offer the potential for producing metamaterials with properties which may differ significantly from their bulk counterpart. Here we describe the production of plasmonic colour filters using periodic arrays of nanoscale cross shaped apertures fabricated in optically opaque silver films. Due to its relatively low loss in the visible and near infrared range, silver is a popular choice for plasmonic devices, however it is also unstable in wet or even ambient conditions. Here we show that ultra-thin layers of Diamond-Like Carbon (DLC) can be used to prevent degradation due to oxidative stress, ageing and corrosion. We demonstrate that DLC effectively protects the sub-micron features which make up the plasmonic colour filter under both atmospheric conditions and accelerated aging using iodine gas. Through a systematic study we confirm that the nanometre thick DLC layers have no effect on the device functionality or performance.

KW - Colour Filters

KW - Diamond-Like Carbon

KW - Oxidation

KW - Plasmonic Devices

KW - Protective Coatings

KW - Surface Plasmon Polaritons

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U2 - 10.1117/12.2202567

DO - 10.1117/12.2202567

M3 - Conference Paper

AN - SCOPUS:84959884611

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Micro+Nano Materials, Devices, and Systems

A2 - Palomba, Stefano

A2 - Eggleton, Benjamin J.

PB - SPIE - International Society for Optical Engineering

T2 - SPIE Micro+Nano Materials, Devices, and Applications Symposium 2015

Y2 - 6 December 2015 through 9 December 2015

ER -

Balaur E, Sadatnajafi C, Langley D, Lin J, Kou SS, Abbey B. Electron-beam induced diamond-like-carbon passivation of plasmonic devices. In Palomba S, Eggleton BJ, editors, Micro+Nano Materials, Devices, and Systems. SPIE - International Society for Optical Engineering. 2015. 966817. (Proceedings of SPIE - The International Society for Optical Engineering). doi: 10.1117/12.2202567

Electron-beam induced diamond-like-carbon passivation of plasmonic devices

Abstract

Publication series

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Keywords

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