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Effects of post-thermal treatment on the properties of rf reactive sputtered ITO films

  • Devendra Maurya

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)76 - 79
Number of pages4
JournalMicroelectronics Journal
Volume38
Issue number1
Publication statusPublished - 2007
Externally publishedYes

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