Effects of post-thermal treatment on the properties of rf reactive sputtered ITO films

Devendra Maurya

Research output: Contribution to journal › Article › Research › peer-review

Cite this

@article{67ef408c6b824f58ac0a4b239239b5e6,

title = "Effects of post-thermal treatment on the properties of rf reactive sputtered ITO films",

author = "Devendra Maurya",

year = "2007",

language = "English",

volume = "38",

pages = "76 -- 79",

journal = "Microelectronics Journal",

issn = "0026-2692",

publisher = "Elsevier",

number = "1",

}