Effects of post-thermal treatment on the properties of rf reactive sputtered ITO films

Devendra Maurya

Research output: Contribution to journalArticleResearchpeer-review

6 Citations (Scopus)
Original languageEnglish
Pages (from-to)76 - 79
Number of pages4
JournalMicroelectronics
Volume38
Issue number1
Publication statusPublished - 2007
Externally publishedYes

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