Effect of Reactive Ion Etch on 4H-SiC Mos Capacitor Performances

Asanka Jayawardena, Sarit Dhar, Ayayi Ahyi

Research output: Contribution to conference › Abstract

Original language	English
DOIs	https://doi.org/10.1149/MA2017-01/27/1290
Publication status	Published - 15 Apr 2017
Externally published	Yes
Event	The Electrochemical Society Meeting 2017 - New Orleans, United States of America Duration: 28 May 2017 → 1 Jun 2017

Conference	The Electrochemical Society Meeting 2017
Country/Territory	United States of America
City	New Orleans
Period	28/05/17 → 1/06/17

Access to Document

@conference{2ee7cc2f2cee4a11bbe354801d3d274a,

title = "Effect of Reactive Ion Etch on 4H-SiC Mos Capacitor Performances",

author = "Asanka Jayawardena and Sarit Dhar and Ayayi Ahyi",

year = "2017",

month = apr,

day = "15",

doi = "10.1149/MA2017-01/27/1290",

language = "English",

note = "The Electrochemical Society Meeting 2017 ; Conference date: 28-05-2017 Through 01-06-2017",

}