Effect of Reactive Ion Etch on 4H-SiC Mos Capacitor Performances

Asanka Jayawardena, Sarit Dhar, Ayayi Ahyi

Research output: Contribution to conferenceAbstract

Original languageEnglish
Publication statusPublished - 15 Apr 2017
Externally publishedYes
EventThe Electrochemical Society Meeting - New Orleans, United States of America
Duration: 28 May 20171 Jun 2017


ConferenceThe Electrochemical Society Meeting
CountryUnited States of America
CityNew Orleans

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