E-beam lithography for micro-/nanofabrication

Matteo Altissimo

Research output: Contribution to journalArticleResearchpeer-review

77 Citations (Scopus)
Original languageEnglish
Pages (from-to)1 - 6
Number of pages6
JournalBiomicrofluidics
Volume4
DOIs
Publication statusPublished - 2010

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