E-beam lithography for micro-/nanofabrication

Matteo Altissimo

Research output: Contribution to journalArticleResearchpeer-review

61 Citations (Scopus)
Original languageEnglish
Pages (from-to)1 - 6
Number of pages6
JournalBiomicrofluidics
Volume4
DOIs
Publication statusPublished - 2010

Cite this

Altissimo, Matteo. / E-beam lithography for micro-/nanofabrication. In: Biomicrofluidics. 2010 ; Vol. 4. pp. 1 - 6.
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title = "E-beam lithography for micro-/nanofabrication",
author = "Matteo Altissimo",
year = "2010",
doi = "10.1063/1.3437589",
language = "English",
volume = "4",
pages = "1 -- 6",
journal = "Biomicrofluidics",
issn = "1932-1058",
publisher = "AIP Publishing",

}

E-beam lithography for micro-/nanofabrication. / Altissimo, Matteo.

In: Biomicrofluidics, Vol. 4, 2010, p. 1 - 6.

Research output: Contribution to journalArticleResearchpeer-review

TY - JOUR

T1 - E-beam lithography for micro-/nanofabrication

AU - Altissimo, Matteo

PY - 2010

Y1 - 2010

U2 - 10.1063/1.3437589

DO - 10.1063/1.3437589

M3 - Article

VL - 4

SP - 1

EP - 6

JO - Biomicrofluidics

JF - Biomicrofluidics

SN - 1932-1058

ER -