Dual resonance modes in two-port SAW resonator sensors: an analysis through scattering matrix approach

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We report dual resonance modes occurring in two-port surface acoustic wave (SAW) resonators attached with typical sensing film and investigated the significance in sensing applications. Two-port SAW resonators operating at 303 MHz frequency were modelled using the scattering matrix approach and resonance frequency characteristics of the resonators were studied for mass loading caused by an arbitrary film attached between the interdigital transducers of the resonator. Depending on the mass loading, symmetric and antisymmetric modes occur around the near resonance frequency of the SAW device. Either a single-mode or both modes are dominant depending on the phase shift caused by the mass loading of the film. Choosing arbitrary film thickness could result in complexity to track the resonance frequency shift and degrade sensing performance. The approach used for analysis can aid to determine the optimum sensing film thickness for two port SAW resonator-based sensors that can exhibit better linearity.

Original languageEnglish
Article number086505
Number of pages12
JournalJapanese Journal of Applied Physics
Issue number8
Publication statusPublished - Aug 2022


  • mass loading
  • resonance
  • SAW sensors

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