Dual-beam laser thermal processing of silicon photovoltaic materials

Brian J. Simonds, Anthony Teal, Tian Zhang, Josh Hadler, Zibo Zhou, Sergey Varlamov, Ivan Perez-Würfl

Research output: Chapter in Book/Report/Conference proceedingConference PaperOther

1 Citation (Scopus)


We have developed an all-laser processing technique by means of two industrially-relevant continuous-wave fiber lasers operating at 1070 nm. This approach is capable of both substrate heating with a large defocused beam and material processing with a second scanned beam, and is suitable for a variety of photovoltaic applications. We have demonstrated this technique for rapid crystallization of thin film (∼10 μm) silicon on glass, which is a low cost alternative to wafer-based solar cells. We have also applied this technique to wafer silicon to control dopant diffusion at the surface region where the focused line beam rapidly melts the substrate that then regrows epitaxially. Finite element simulations have been used to model the melt depth as a function of preheat temperature and line beam power. This process is carried out in tens of seconds for an area approximately 10 cm2 using only about 1 kW of total optical power and is readily scalable. In this paper, we will discuss our results with both c-Si wafers and thin-film silicon.

Original languageEnglish
Title of host publicationProceedings of SPIE
Subtitle of host publicationLaser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI
EditorsBeat Neuenschwander, Stephan Roth, Costa P. Grigoropoulos , Tetsuya Makimura
Place of PublicationWashington DC USA
Number of pages8
ISBN (Electronic)9781628419702
Publication statusPublished - 2016
Externally publishedYes
EventConference on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) 2016 - San Francisco, United States of America
Duration: 13 Feb 201618 Feb 2016
Conference number: 21st
https://www.spiedigitallibrary.org/conference-proceedings-of-spie/9735.toc?SSO=1 (Proceedings)


ConferenceConference on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) 2016
Abbreviated titleLAMOM 2016
CountryUnited States of America
CitySan Francisco
Internet address


  • crystallization
  • dopant diffusion
  • Laser processing
  • photovoltaics
  • silicon

Cite this