Direct writing laser of high aspect ratio epoxy microstructures

V. J. Cadarso; K. Pfeiffer; U. Ostrzinski; J B  Bureau; G A Racine; A Voigt; G Gruetzner; J Brugger

doi:10.1088/0960-1317/21/1/017003

Direct writing laser of high aspect ratio epoxy microstructures

V. J. Cadarso, K. Pfeiffer, U. Ostrzinski, J B Bureau, G A Racine, A Voigt, G Gruetzner, J Brugger

Research output: Contribution to journal › Article › Research › peer-review

26 Citations (Scopus)

Abstract

The development of high aspect ratio (AR) structures is of great interest in several fields such as micro-electro-mechanical systems or microfluidics. In this note we present a new processing method of epoxy materials based on direct write laser (DWL) scanning exposure. In this work, we describe the application of this technique for fast prototyping, and the cost-efficient fabrication of structures with a high AR over 40. Such properties demonstrate the proposed DWL of epoxy materials as a promising candidate for the development of polymer-based microsystems.

Original language	English
Article number	017003
Pages (from-to)	1-6
Number of pages	6
Journal	Journal of Micromechanics and Microengineering
Volume	21
Issue number	1
DOIs	https://doi.org/10.1088/0960-1317/21/1/017003
Publication status	Published - Jan 2011
Externally published	Yes

Access to Document

10.1088/0960-1317/21/1/017003

Cite this

@article{4b1001528f464ce7a2e106b91f4afe36,

title = "Direct writing laser of high aspect ratio epoxy microstructures",

abstract = "The development of high aspect ratio (AR) structures is of great interest in several fields such as micro-electro-mechanical systems or microfluidics. In this note we present a new processing method of epoxy materials based on direct write laser (DWL) scanning exposure. In this work, we describe the application of this technique for fast prototyping, and the cost-efficient fabrication of structures with a high AR over 40. Such properties demonstrate the proposed DWL of epoxy materials as a promising candidate for the development of polymer-based microsystems. ",

author = "Cadarso, {V. J.} and K. Pfeiffer and U. Ostrzinski and Bureau, {J B} and Racine, {G A} and A Voigt and G Gruetzner and J Brugger",

year = "2011",

month = jan,

doi = "10.1088/0960-1317/21/1/017003",

language = "English",

volume = "21",

pages = "1--6",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

number = "1",

}

TY - JOUR

T1 - Direct writing laser of high aspect ratio epoxy microstructures

AU - Cadarso, V. J.

AU - Pfeiffer, K.

AU - Ostrzinski, U.

AU - Bureau, J B

AU - Racine, G A

AU - Voigt, A

AU - Gruetzner, G

AU - Brugger, J

PY - 2011/1

Y1 - 2011/1

N2 - The development of high aspect ratio (AR) structures is of great interest in several fields such as micro-electro-mechanical systems or microfluidics. In this note we present a new processing method of epoxy materials based on direct write laser (DWL) scanning exposure. In this work, we describe the application of this technique for fast prototyping, and the cost-efficient fabrication of structures with a high AR over 40. Such properties demonstrate the proposed DWL of epoxy materials as a promising candidate for the development of polymer-based microsystems.

AB - The development of high aspect ratio (AR) structures is of great interest in several fields such as micro-electro-mechanical systems or microfluidics. In this note we present a new processing method of epoxy materials based on direct write laser (DWL) scanning exposure. In this work, we describe the application of this technique for fast prototyping, and the cost-efficient fabrication of structures with a high AR over 40. Such properties demonstrate the proposed DWL of epoxy materials as a promising candidate for the development of polymer-based microsystems.

UR - http://www.scopus.com/inward/record.url?scp=78651502636&partnerID=8YFLogxK

U2 - 10.1088/0960-1317/21/1/017003

DO - 10.1088/0960-1317/21/1/017003

M3 - Article

AN - SCOPUS:78651502636

SN - 0960-1317

VL - 21

SP - 1

EP - 6

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 1

M1 - 017003

ER -

Direct writing laser of high aspect ratio epoxy microstructures

Abstract

Access to Document

Other files and links

Cite this