Development of novel hybrid flexure-based microgrippers for precision micro-object manipulation

Mohd Nashrul Mohd Zubir, Bijan Shirinzadeh, Yanling Tian

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33 Citations (Scopus)


This paper describes the process of developing a microgripper that is capable of high precision and fidelity manipulation of micro-objects. The design adopts the concept of flexure-based hinges on its joints to provide the rotational motion, thus eliminating the inherent nonlinearities associated with the application of conventional rigid hinges. A combination of two modeling techniques, namely, pseudorigid body model and finite element analysis was utilized to expedite the prototyping procedure, which leads to the establishment of a high performance mechanism. A new hybrid compliant structure integrating cantilever beam and flexural hinge configurations within microgripper mechanism mainframe has been developed. This concept provides a novel approach to harness the advantages within each individual configuration while mutually compensating the limitations inherent between them. A wire electrodischarge machining technique was utilized to fabricate the gripper out of high grade aluminum alloy (Al 7075T6). Experimental studies were conducted on the model to obtain various correlations governing the gripper performance as well as for model verification. The experimental results demonstrate high level of compliance in comparison to the computational results. A high amplification characteristic and maximum achievable stroke of 100 μm can be achieved.

Original languageEnglish
Article number065106
JournalReview of Scientific Instruments
Issue number6
Publication statusPublished - 2009

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