Development of finite element model for pulse laser cutting process of silicon wafer

Ahmad Fikhri Dakhirrudin; Kok Soo Teoh; Thota Venugopal

Development of finite element model for pulse laser cutting process of silicon wafer

Ahmad Fikhri Dakhirrudin, Kok Soo Teoh, Thota Venugopal

Malaysia School of Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

Original language	English
Title of host publication	Proceeding of the Progress in Science and Engineering for Sustainable Development (CUTSE 2009)
Editors	Alexander Gorin
Place of Publication	Sarawak Malaysia
Publisher	Curtin University of Technology
Pages	1 - 7
Number of pages	7
ISBN (Print)	9789834417628
Publication status	Published - 2009
Event	International Conference on Curtin University of Technology Science and Engineering (CUTSE) 2009 - Sarawak, Malaysia Duration: 24 Nov 2009 → 25 Nov 2009 Conference number: 2nd

Conference

Conference	International Conference on Curtin University of Technology Science and Engineering (CUTSE) 2009
Abbreviated title	CUTSE 2009
Country/Territory	Malaysia
City	Sarawak
Period	24/11/09 → 25/11/09

Cite this

@inproceedings{e2012dc5f5b84f749e74b89ed8106cf9,

title = "Development of finite element model for pulse laser cutting process of silicon wafer",

author = "Dakhirrudin, \{Ahmad Fikhri\} and Teoh, \{Kok Soo\} and Thota Venugopal",

year = "2009",

language = "English",

isbn = "9789834417628",

pages = "1 -- 7",

editor = "Alexander Gorin",

booktitle = "Proceeding of the Progress in Science and Engineering for Sustainable Development (CUTSE 2009)",

publisher = "Curtin University of Technology",

address = "Australia",

note = "International Conference on Curtin University of Technology Science and Engineering (CUTSE) 2009, CUTSE 2009 ; Conference date: 24-11-2009 Through 25-11-2009",

}

Dakhirrudin, AF, Teoh, KS & Venugopal, T 2009, Development of finite element model for pulse laser cutting process of silicon wafer. in A Gorin (ed.), Proceeding of the Progress in Science and Engineering for Sustainable Development (CUTSE 2009). Curtin University of Technology, Sarawak Malaysia, pp. 1 - 7, International Conference on Curtin University of Technology Science and Engineering (CUTSE) 2009, Sarawak, Malaysia, 24/11/09.

Development of finite element model for pulse laser cutting process of silicon wafer. / Dakhirrudin, Ahmad Fikhri; Teoh, Kok Soo; Venugopal, Thota.
Proceeding of the Progress in Science and Engineering for Sustainable Development (CUTSE 2009). ed. / Alexander Gorin. Sarawak Malaysia: Curtin University of Technology, 2009. p. 1 - 7.

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

TY - GEN

T1 - Development of finite element model for pulse laser cutting process of silicon wafer

AU - Dakhirrudin, Ahmad Fikhri

AU - Teoh, Kok Soo

AU - Venugopal, Thota

N1 - Conference code: 2nd

PY - 2009

Y1 - 2009

M3 - Conference Paper

SN - 9789834417628

SP - 1

EP - 7

BT - Proceeding of the Progress in Science and Engineering for Sustainable Development (CUTSE 2009)

A2 - Gorin, Alexander

PB - Curtin University of Technology

CY - Sarawak Malaysia

T2 - International Conference on Curtin University of Technology Science and Engineering (CUTSE) 2009

Y2 - 24 November 2009 through 25 November 2009

ER -