Development of an end-effector mounted tracking methodology for feedback control of high precision 3-DOF planar motions

Leon  Clark; Bijan Shirinzadeh; Julian Smith; Bin Yao; Sergej Fatikow

doi:10.1109/AIM.2016.7576987

Development of an end-effector mounted tracking methodology for feedback control of high precision 3-DOF planar motions

Leon Clark, Bijan Shirinzadeh, Julian Smith, Bin Yao, Sergej Fatikow

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

1 Citation (Scopus)

Abstract

This paper presents the development of a methodology for laser interferometry based pose measurement of a three degree of freedom (DOF) planar nanopositioning stage, and its use for tracking control over a large workspace. The proposed methodology employs a miniature pure rotation scanner mounted atop the stage's end effector to provide compensation for any sensor misalignment introduced through motion of the yaw axis, thereby reducing the impact of geometric errors. A feedforward-feedback compound controller is established for both the misalignment compensation and tracking aspects of operation, and experimentation is performed which demonstrates high precision positioning. Sensor positioning considerations are shown to have a crucial impact on tracking performance.

Original language	English
Title of host publication	2016 IEEE International Conference on Advanced Intelligent Mechatronics (AIM 2016)
Subtitle of host publication	Banff, Alberta, Canada, 12-15 July 2016
Place of Publication	Piscataway, NJ
Publisher	IEEE, Institute of Electrical and Electronics Engineers
Pages	1527-1532
Number of pages	6
ISBN (Electronic)	9781509020652
ISBN (Print)	9781509020669
DOIs	https://doi.org/10.1109/AIM.2016.7576987
Publication status	Published - 26 Sept 2016
Event	IEEE/ASME International Conference on Advanced Intelligent Mechatronics 2016 - Banff, Canada Duration: 12 Jul 2016 → 15 Jul 2016 Conference number: 15th http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=7568655 (Proceedings)

Conference

Conference	IEEE/ASME International Conference on Advanced Intelligent Mechatronics 2016
Abbreviated title	AIM 2016
Country/Territory	Canada
City	Banff
Period	12/07/16 → 15/07/16
Internet address	http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=7568655 (Proceedings)

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10.1109/AIM.2016.7576987

Cite this

Clark, L., Shirinzadeh, B., Smith, J., Yao, B., & Fatikow, S. (2016). Development of an end-effector mounted tracking methodology for feedback control of high precision 3-DOF planar motions. In 2016 IEEE International Conference on Advanced Intelligent Mechatronics (AIM 2016): Banff, Alberta, Canada, 12-15 July 2016 (pp. 1527-1532). Article 7576987 IEEE, Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/AIM.2016.7576987

Clark, Leon ; Shirinzadeh, Bijan ; Smith, Julian et al. / Development of an end-effector mounted tracking methodology for feedback control of high precision 3-DOF planar motions. 2016 IEEE International Conference on Advanced Intelligent Mechatronics (AIM 2016): Banff, Alberta, Canada, 12-15 July 2016. Piscataway, NJ : IEEE, Institute of Electrical and Electronics Engineers, 2016. pp. 1527-1532

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title = "Development of an end-effector mounted tracking methodology for feedback control of high precision 3-DOF planar motions",

abstract = "This paper presents the development of a methodology for laser interferometry based pose measurement of a three degree of freedom (DOF) planar nanopositioning stage, and its use for tracking control over a large workspace. The proposed methodology employs a miniature pure rotation scanner mounted atop the stage's end effector to provide compensation for any sensor misalignment introduced through motion of the yaw axis, thereby reducing the impact of geometric errors. A feedforward-feedback compound controller is established for both the misalignment compensation and tracking aspects of operation, and experimentation is performed which demonstrates high precision positioning. Sensor positioning considerations are shown to have a crucial impact on tracking performance.",

author = "Leon Clark and Bijan Shirinzadeh and Julian Smith and Bin Yao and Sergej Fatikow",

year = "2016",

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doi = "10.1109/AIM.2016.7576987",

language = "English",

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booktitle = "2016 IEEE International Conference on Advanced Intelligent Mechatronics (AIM 2016)",

publisher = "IEEE, Institute of Electrical and Electronics Engineers",

address = "United States of America",

note = "IEEE/ASME International Conference on Advanced Intelligent Mechatronics 2016, AIM 2016 ; Conference date: 12-07-2016 Through 15-07-2016",

url = "http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=7568655",

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Clark, L, Shirinzadeh, B , Smith, J, Yao, B & Fatikow, S 2016, Development of an end-effector mounted tracking methodology for feedback control of high precision 3-DOF planar motions. in 2016 IEEE International Conference on Advanced Intelligent Mechatronics (AIM 2016): Banff, Alberta, Canada, 12-15 July 2016., 7576987, IEEE, Institute of Electrical and Electronics Engineers, Piscataway, NJ , pp. 1527-1532, IEEE/ASME International Conference on Advanced Intelligent Mechatronics 2016, Banff, Alberta, Canada, 12/07/16. https://doi.org/10.1109/AIM.2016.7576987

Development of an end-effector mounted tracking methodology for feedback control of high precision 3-DOF planar motions. / Clark, Leon ; Shirinzadeh, Bijan ; Smith, Julian et al.
2016 IEEE International Conference on Advanced Intelligent Mechatronics (AIM 2016): Banff, Alberta, Canada, 12-15 July 2016. Piscataway, NJ : IEEE, Institute of Electrical and Electronics Engineers, 2016. p. 1527-1532 7576987.

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

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AB - This paper presents the development of a methodology for laser interferometry based pose measurement of a three degree of freedom (DOF) planar nanopositioning stage, and its use for tracking control over a large workspace. The proposed methodology employs a miniature pure rotation scanner mounted atop the stage's end effector to provide compensation for any sensor misalignment introduced through motion of the yaw axis, thereby reducing the impact of geometric errors. A feedforward-feedback compound controller is established for both the misalignment compensation and tracking aspects of operation, and experimentation is performed which demonstrates high precision positioning. Sensor positioning considerations are shown to have a crucial impact on tracking performance.

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Clark L, Shirinzadeh B , Smith J, Yao B, Fatikow S. Development of an end-effector mounted tracking methodology for feedback control of high precision 3-DOF planar motions. In 2016 IEEE International Conference on Advanced Intelligent Mechatronics (AIM 2016): Banff, Alberta, Canada, 12-15 July 2016. Piscataway, NJ : IEEE, Institute of Electrical and Electronics Engineers. 2016. p. 1527-1532. 7576987 doi: 10.1109/AIM.2016.7576987

Development of an end-effector mounted tracking methodology for feedback control of high precision 3-DOF planar motions

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Melbourne Centre for Nanofabrication (MCN)

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Development of an end-effector mounted tracking methodology for feedback control of high precision 3-DOF planar motions

Abstract

Conference

Access to Document

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Melbourne Centre for Nanofabrication (MCN)

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