Development of an end-effector mounted tracking methodology for feedback control of high precision 3-DOF planar motions

Leon Clark, Bijan Shirinzadeh, Julian Smith, Bin Yao, Sergej Fatikow

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This paper presents the development of a methodology for laser interferometry based pose measurement of a three degree of freedom (DOF) planar nanopositioning stage, and its use for tracking control over a large workspace. The proposed methodology employs a miniature pure rotation scanner mounted atop the stage's end effector to provide compensation for any sensor misalignment introduced through motion of the yaw axis, thereby reducing the impact of geometric errors. A feedforward-feedback compound controller is established for both the misalignment compensation and tracking aspects of operation, and experimentation is performed which demonstrates high precision positioning. Sensor positioning considerations are shown to have a crucial impact on tracking performance.

Original languageEnglish
Title of host publication2016 IEEE International Conference on Advanced Intelligent Mechatronics (AIM 2016)
Subtitle of host publicationBanff, Alberta, Canada, 12-15 July 2016
Place of PublicationPiscataway, NJ
PublisherIEEE, Institute of Electrical and Electronics Engineers
Number of pages6
ISBN (Electronic)9781509020652
ISBN (Print)9781509020669
Publication statusPublished - 26 Sep 2016
EventIEEE/ASME International Conference on Advanced Intelligent Mechatronics 2016 - Banff, Canada
Duration: 12 Jul 201615 Jul 2016
Conference number: 15th (Proceedings)


ConferenceIEEE/ASME International Conference on Advanced Intelligent Mechatronics 2016
Abbreviated titleAIM 2016
Internet address

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