Development of a piezo-driven 3-DOF stage with T-shape flexible hinge mechanism

Kunhai Cai, Yanling Tian, Fujun Wang, Dawei Zhang, Bijan Shirinzadeh

Research output: Contribution to journalArticleResearchpeer-review

66 Citations (Scopus)

Abstract

This paper presents a 3-DOF (Degree of freedom) stage with T-shape flexible hinge mechanism for the applications in the precision measurement equipments and micro/nano manipulation systems. The stage is driven by three piezoelectric actuators (PEAs) and guided by a flexible hinge based mechanism with three symmetric T-shape hinges. The proposed T-shape flexible hinge mechanism can provide excellent planar motion capability with high stability, and thus guarantee the outstanding dynamics characteristics. The theoretical modeling of the stage was carried out and the stiffness and the dynamic resonance frequency have been obtained. The kinematic model of the 3-DOF stage was established and the workspace has been analyzed. The characteristics of the stage were investigated using finite element analysis (FEA). Experiments were conducted to examine the performance of the stage, through this stage, X-axis translational motion stroke of 6.9 μm, Y-axis translational motion stroke of 8.5 μm and rotational motion stroke along Z-axis of 289 μrad can be achieved. A hybrid feedforward/feedback control methodology has been proposed to eliminate the nonlinear hysteresis, the trajectory tracking performances and to reduce external disturbance of the 3-DOF stage.

Original languageEnglish
Article number1356
Pages (from-to)125-138
Number of pages14
JournalRobotics and Computer-Integrated Manufacturing
Volume37
DOIs
Publication statusPublished - 24 Jul 2016

Keywords

  • Stage
  • Piezoelectric actuators
  • Flexible hinge mechanism

Cite this