Development of a novel 3-DOF suspension mechanism for multi-function stylus profiling systems

Jia Tian, Yanling Tian, Zhiyong Guo, Fujun Wang, Dawei Zhang, Xianping Liu, Bijian Shirinzadeh

Research output: Contribution to journalArticleResearchpeer-review

6 Citations (Scopus)

Abstract

This paper proposes a novel 3-DOF suspension mechanism for multi-function stylus profiling systems. Incorporating an electromagnetic force actuator, the 3-DOF suspension mechanism provides a controlled loading force. For reasons of the thermal and mechanical stability, a triangular flexure structure is utilized to support the stylus. The stiffness matrix method is used to establish the analytical stiffness model of the 3-DOF suspension mechanism. Considering the 3-DOF suspension mechanism as a 3-DOF lumped-mass-spring system, the dynamic model is established. Finite element analysis (FEA) is used to validate the established static and dynamic models of the 3-DOF suspension mechanism. A prototype is fabricated and experimental tests are carried out to characterize the mechanism’s performance. The results show that the 3-DOF suspension mechanism provides a controlled force in a range of up to 10 mN and has a working range in excess of 10 μm with a first natural frequency of 342 Hz in Z axis, indicating good capability for multi-function measurements at the micro/nano scale.

Original languageEnglish
Pages (from-to)1415-1423
Number of pages9
JournalInternational Journal of Precision Engineering and Manufacturing
Volume17
Issue number11
DOIs
Publication statusPublished - 1 Nov 2016

Keywords

  • Electromagnetic force actuator
  • Flexure structure
  • Stylus instrument
  • Surface profiling

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