Development of a dexterous haptic micro/nanomanipulator utilizing a hybrid parallel-serial flexure mechanism

Joshua Pinskier, Bijan Shirinzadeh, Leon Clark, Yanding Qin

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

4 Citations (Scopus)


Flexible new micro/nanomanipulation tools are required to intuitively perform micro/nano operations without the need for expensive, bespoke tools. In this paper, the design and analysis of a dexterous 4 degree of freedom (DOF) hybrid serial-parallel micro/nanomanipulator is presented. The manipulator is controlled through a haptic device, enabling a trained user to control the system's motion, and sense the contact force applied to the target. The hybrid mechanism consists of a planar 3-DOF flexure-mechanism coupled to a 1-DOF flexure-mechanism. Both of the subsystems are monolithically constructed, and incorporate piezoelectric actuators (PEAs). The total mechanism is capable of motions up to 39.16, 36.18, and 38.9 micrometers in the X, Y, and Z axes, respectively, and 2.309 milliradians of rotation about the Z axis. A combination feedforward-feedback scaled haptic control scheme is developed. Using this, and with appropriate choice of end-effector, a user can perform a range of high-precision micromanipulation and assembly tasks. The mechanical design and analysis of the 4-DOF mechanism, and haptic control scheme are presented. The performance of the system is experimentally investigated, and the haptic scheme verified.

Original languageEnglish
Title of host publication2016 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS 2016)
Subtitle of host publication18-22 July, 2016, Paris, France [Proceedings]
EditorsSinan Haliyo, Albert Sill, Stéphane Régnier, Sergej Fatikow
Place of PublicationPiscataway, NJ
PublisherIEEE, Institute of Electrical and Electronics Engineers
Number of pages6
ISBN (Electronic)9781509015108
ISBN (Print)9781509015115
Publication statusPublished - 6 Sep 2016
EventInternational Conference on Manipulation, Automation and Robotics at Small Scales 2016 - Paris, France
Duration: 18 Jul 201621 Jul 2016
Conference number: 1st


ConferenceInternational Conference on Manipulation, Automation and Robotics at Small Scales 2016
Abbreviated titleMARSS 2016

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