Development and control of a two DOF linear-angular precision positioning stage

Leon Clark, Bijan Shirinzadeh, Umesh Bhagat, Julian Smith, Yongmin Zhong

Research output: Contribution to journalArticleResearchpeer-review

38 Citations (Scopus)

Abstract

This paper presents the mechanical design, optimisation and tracking control of a flexure-based positioning stage to generate coupled linear and angular motions. The mechanism employs two piezoelectric actuators, with output translation and rotation proportional to the difference and sum of the input displacements. Computational optimisation utilising finite element analysis is used to develop designs that maximise the working range. A dynamic model is developed, leading to the establishment of a proposed sliding mode controller to allow the stage to track desired trajectories. An adaptive gain is implemented to reduce errors in the estimated kinematics, and accommodate creep within the mechanism. A prototype of the mechanism has been manufactured, and experimentation has been performed to verify computational predictions of the mechanism behaviour. The ability of the proposed controller to execute precise tracking of a desired trajectory within the workspace is demonstrated in the experimental study.

Original languageEnglish
Pages (from-to)34-43
Number of pages10
JournalMechatronics
Volume32
DOIs
Publication statusPublished - 1 Dec 2015

Keywords

  • Adaptive control
  • Flexure-based mechanism
  • Micro-nano positioning
  • Sliding mode control

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