Design, prototyping, modeling and control of a MEMS nanopositioning stage

Yong Zhu; Ali Bazaei; Seyed O R Moheimani; Mehmet Yuce

Design, prototyping, modeling and control of a MEMS nanopositioning stage

Yong Zhu
, Ali Bazaei
, Seyed O R Moheimani
, Mehmet Yuce

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

Original language	English
Title of host publication	Proceedings of the American Control Conference
Editors	Martha Grover
Place of Publication	New York USA
Publisher	IEEE, Institute of Electrical and Electronics Engineers
Pages	2278 - 2283
Number of pages	6
ISBN (Print)	9781457700811
Publication status	Published - 2011
Externally published	Yes
Event	American Control Conference 2011 - San Francisco, United States of America Duration: 29 Jun 2011 → 1 Jul 2011 https://ieeexplore.ieee.org/xpl/conhome/5975310/proceeding (Proceedings)

Conference

Conference	American Control Conference 2011
Abbreviated title	ACC 2011
Country/Territory	United States of America
City	San Francisco
Period	29/06/11 → 1/07/11
Internet address	https://ieeexplore.ieee.org/xpl/conhome/5975310/proceeding (Proceedings)

Cite this

@inproceedings{641d8518a5254444ac494550e119bfa1,

title = "Design, prototyping, modeling and control of a MEMS nanopositioning stage",

author = "Yong Zhu and Ali Bazaei and Moheimani, \{Seyed O R\} and Mehmet Yuce",

year = "2011",

language = "English",

isbn = "9781457700811",

pages = "2278 -- 2283",

editor = "Martha Grover",

booktitle = "Proceedings of the American Control Conference",

publisher = "IEEE, Institute of Electrical and Electronics Engineers",

address = "United States of America",

note = "American Control Conference 2011, ACC 2011 ; Conference date: 29-06-2011 Through 01-07-2011",

url = "https://ieeexplore.ieee.org/xpl/conhome/5975310/proceeding",

}

Zhu, Y, Bazaei, A, Moheimani, SOR & Yuce, M 2011, Design, prototyping, modeling and control of a MEMS nanopositioning stage. in M Grover (ed.), Proceedings of the American Control Conference. IEEE, Institute of Electrical and Electronics Engineers, New York USA, pp. 2278 - 2283, American Control Conference 2011, San Francisco, California, United States of America, 29/06/11.

Design, prototyping, modeling and control of a MEMS nanopositioning stage. / Zhu, Yong; Bazaei, Ali; Moheimani, Seyed O R et al.
Proceedings of the American Control Conference. ed. / Martha Grover. New York USA: IEEE, Institute of Electrical and Electronics Engineers, 2011. p. 2278 - 2283.

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

TY - GEN

T1 - Design, prototyping, modeling and control of a MEMS nanopositioning stage

AU - Zhu, Yong

AU - Bazaei, Ali

AU - Moheimani, Seyed O R

AU - Yuce, Mehmet

PY - 2011

Y1 - 2011

UR - http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=5991449

M3 - Conference Paper

SN - 9781457700811

SP - 2278

EP - 2283

BT - Proceedings of the American Control Conference

A2 - Grover, Martha

PB - IEEE, Institute of Electrical and Electronics Engineers

CY - New York USA

T2 - American Control Conference 2011

Y2 - 29 June 2011 through 1 July 2011

ER -

Design, prototyping, modeling and control of a MEMS nanopositioning stage

Conference

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Cite this