Design, prototyping, modeling and control of a MEMS nanopositioning stage

Yong Zhu, Ali Bazaei, Seyed O R Moheimani, Mehmet Yuce

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

6 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings of the American Control Conference
EditorsMartha Grover
Place of PublicationNew York USA
PublisherIEEE, Institute of Electrical and Electronics Engineers
Pages2278 - 2283
Number of pages6
ISBN (Print)9781457700811
Publication statusPublished - 2011
Externally publishedYes
EventAmerican Control Conference 2011 - San Francisco, United States of America
Duration: 29 Jun 20111 Jul 2011 (Proceedings)


ConferenceAmerican Control Conference 2011
Abbreviated titleACC 2011
Country/TerritoryUnited States of America
CitySan Francisco
Internet address

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