Design of a micro-gripper and an ultrasonic manipulator for handling micron sized objects

F. Beyeler; D. J. Bell; B. J. Nelson; Y. Sun; A. Neild; S. Oberti; J. Dual

doi:10.1109/IROS.2006.282628

Design of a micro-gripper and an ultrasonic manipulator for handling micron sized objects

F. Beyeler, D. J. Bell, B. J. Nelson, Y. Sun, A. Neild, S. Oberti, J. Dual

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Other

36 Citations (Scopus)

Abstract

This work reports on a system consisting of a MEMS (microelectromechanical system) gripper and an ultrasonic manipulator. The gripper is electrostatically actuated and includes an integrated force sensor measuring the gripping force. The device is monolithically fabricated using a silicon-on-insulator (SOI) fabrication process. The resolution of the force sensor is in the sub-micronewton range and, therefore, provides feedback of the forces that dominate the micromanipulation processes. A MEMS ultrasonic device is described which aligns small objects such as biological cells prior to manipulation with the gripper. The concept is demonstrated with polymer spheres, glass spheres and Hela cancer cells, thus providing a useful tool in micro-robotics and biological research.

Original language	English
Title of host publication	2006 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2006
Publisher	IEEE, Institute of Electrical and Electronics Engineers
Pages	772-777
Number of pages	6
ISBN (Print)	142440259X, 9781424402595
DOIs	https://doi.org/10.1109/IROS.2006.282628
Publication status	Published - 2006
Externally published	Yes
Event	IEEE/RSJ International Conference on Intelligent Robots and Systems 2006 - Beijing, China Duration: 9 Oct 2006 → 15 Oct 2006 https://ieeexplore.ieee.org/xpl/conhome/4058334/proceeding (Proceedings)

Conference

Conference	IEEE/RSJ International Conference on Intelligent Robots and Systems 2006
Abbreviated title	IROS 2006
Country/Territory	China
City	Beijing
Period	9/10/06 → 15/10/06
Internet address	https://ieeexplore.ieee.org/xpl/conhome/4058334/proceeding (Proceedings)

Keywords

Force feedback
Hela cells
Microgripper
Ultrasonic positioning

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1109/IROS.2006.282628

Cite this

Beyeler, F., Bell, D. J., Nelson, B. J., Sun, Y., Neild, A., Oberti, S., & Dual, J. (2006). Design of a micro-gripper and an ultrasonic manipulator for handling micron sized objects. In 2006 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2006 (pp. 772-777). IEEE, Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/IROS.2006.282628

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title = "Design of a micro-gripper and an ultrasonic manipulator for handling micron sized objects",

abstract = "This work reports on a system consisting of a MEMS (microelectromechanical system) gripper and an ultrasonic manipulator. The gripper is electrostatically actuated and includes an integrated force sensor measuring the gripping force. The device is monolithically fabricated using a silicon-on-insulator (SOI) fabrication process. The resolution of the force sensor is in the sub-micronewton range and, therefore, provides feedback of the forces that dominate the micromanipulation processes. A MEMS ultrasonic device is described which aligns small objects such as biological cells prior to manipulation with the gripper. The concept is demonstrated with polymer spheres, glass spheres and Hela cancer cells, thus providing a useful tool in micro-robotics and biological research.",

keywords = "Force feedback, Hela cells, Microgripper, Ultrasonic positioning",

author = "F. Beyeler and Bell, {D. J.} and Nelson, {B. J.} and Y. Sun and A. Neild and S. Oberti and J. Dual",

year = "2006",

doi = "10.1109/IROS.2006.282628",

language = "English",

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publisher = "IEEE, Institute of Electrical and Electronics Engineers",

address = "United States of America",

note = "IEEE/RSJ International Conference on Intelligent Robots and Systems 2006, IROS 2006 ; Conference date: 09-10-2006 Through 15-10-2006",

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Beyeler, F, Bell, DJ, Nelson, BJ, Sun, Y, Neild, A, Oberti, S & Dual, J 2006, Design of a micro-gripper and an ultrasonic manipulator for handling micron sized objects. in 2006 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2006. IEEE, Institute of Electrical and Electronics Engineers, pp. 772-777, IEEE/RSJ International Conference on Intelligent Robots and Systems 2006, Beijing, China, 9/10/06. https://doi.org/10.1109/IROS.2006.282628

Design of a micro-gripper and an ultrasonic manipulator for handling micron sized objects. / Beyeler, F.; Bell, D. J.; Nelson, B. J. et al.
2006 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2006. IEEE, Institute of Electrical and Electronics Engineers, 2006. p. 772-777.

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Other

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T1 - Design of a micro-gripper and an ultrasonic manipulator for handling micron sized objects

AU - Beyeler, F.

AU - Bell, D. J.

AU - Nelson, B. J.

AU - Sun, Y.

AU - Neild, A.

AU - Oberti, S.

AU - Dual, J.

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N2 - This work reports on a system consisting of a MEMS (microelectromechanical system) gripper and an ultrasonic manipulator. The gripper is electrostatically actuated and includes an integrated force sensor measuring the gripping force. The device is monolithically fabricated using a silicon-on-insulator (SOI) fabrication process. The resolution of the force sensor is in the sub-micronewton range and, therefore, provides feedback of the forces that dominate the micromanipulation processes. A MEMS ultrasonic device is described which aligns small objects such as biological cells prior to manipulation with the gripper. The concept is demonstrated with polymer spheres, glass spheres and Hela cancer cells, thus providing a useful tool in micro-robotics and biological research.

AB - This work reports on a system consisting of a MEMS (microelectromechanical system) gripper and an ultrasonic manipulator. The gripper is electrostatically actuated and includes an integrated force sensor measuring the gripping force. The device is monolithically fabricated using a silicon-on-insulator (SOI) fabrication process. The resolution of the force sensor is in the sub-micronewton range and, therefore, provides feedback of the forces that dominate the micromanipulation processes. A MEMS ultrasonic device is described which aligns small objects such as biological cells prior to manipulation with the gripper. The concept is demonstrated with polymer spheres, glass spheres and Hela cancer cells, thus providing a useful tool in micro-robotics and biological research.

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KW - Ultrasonic positioning

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BT - 2006 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2006

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ER -

Design of a micro-gripper and an ultrasonic manipulator for handling micron sized objects

Abstract

Conference

Keywords

UN SDGs

Access to Document

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Cite this