Abstract
This work reports on a system consisting of a MEMS (microelectromechanical system) gripper and an ultrasonic manipulator. The gripper is electrostatically actuated and includes an integrated force sensor measuring the gripping force. The device is monolithically fabricated using a silicon-on-insulator (SOI) fabrication process. The resolution of the force sensor is in the sub-micronewton range and, therefore, provides feedback of the forces that dominate the micromanipulation processes. A MEMS ultrasonic device is described which aligns small objects such as biological cells prior to manipulation with the gripper. The concept is demonstrated with polymer spheres, glass spheres and Hela cancer cells, thus providing a useful tool in micro-robotics and biological research.
Original language | English |
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Title of host publication | 2006 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2006 |
Publisher | IEEE, Institute of Electrical and Electronics Engineers |
Pages | 772-777 |
Number of pages | 6 |
ISBN (Print) | 142440259X, 9781424402595 |
DOIs | |
Publication status | Published - 2006 |
Externally published | Yes |
Event | IEEE/RSJ International Conference on Intelligent Robots and Systems 2006 - Beijing, China Duration: 9 Oct 2006 → 15 Oct 2006 https://ieeexplore.ieee.org/xpl/conhome/4058334/proceeding (Proceedings) |
Conference
Conference | IEEE/RSJ International Conference on Intelligent Robots and Systems 2006 |
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Abbreviated title | IROS 2006 |
Country/Territory | China |
City | Beijing |
Period | 9/10/06 → 15/10/06 |
Internet address |
Keywords
- Force feedback
- Hela cells
- Microgripper
- Ultrasonic positioning