Design of a micro-gripper and an ultrasonic manipulator for handling micron sized objects

F. Beyeler; D. J. Bell; B. J. Nelson; Y. Sun; A. Neild; S. Oberti; J. Dual

doi:10.1109/IROS.2006.282628

Design of a micro-gripper and an ultrasonic manipulator for handling micron sized objects

F. Beyeler, D. J. Bell, B. J. Nelson, Y. Sun, A. Neild, S. Oberti, J. Dual

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Other

33 Citations (Scopus)

Abstract

This work reports on a system consisting of a MEMS (microelectromechanical system) gripper and an ultrasonic manipulator. The gripper is electrostatically actuated and includes an integrated force sensor measuring the gripping force. The device is monolithically fabricated using a silicon-on-insulator (SOI) fabrication process. The resolution of the force sensor is in the sub-micronewton range and, therefore, provides feedback of the forces that dominate the micromanipulation processes. A MEMS ultrasonic device is described which aligns small objects such as biological cells prior to manipulation with the gripper. The concept is demonstrated with polymer spheres, glass spheres and Hela cancer cells, thus providing a useful tool in micro-robotics and biological research.

Original language	English
Title of host publication	2006 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2006
Pages	772-777
Number of pages	6
DOIs	https://doi.org/10.1109/IROS.2006.282628
Publication status	Published - 2006
Externally published	Yes
Event	IEEE/RSJ International Conference on Intelligent Robots and Systems 2006 - Beijing, China Duration: 9 Oct 2006 → 15 Oct 2006 https://ieeexplore.ieee.org/xpl/conhome/4058334/proceeding (Proceedings)

Conference

Conference	IEEE/RSJ International Conference on Intelligent Robots and Systems 2006
Abbreviated title	IROS 2006
Country/Territory	China
City	Beijing
Period	9/10/06 → 15/10/06
Internet address	https://ieeexplore.ieee.org/xpl/conhome/4058334/proceeding (Proceedings)

Keywords

Force feedback
Hela cells
Microgripper
Ultrasonic positioning

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1109/IROS.2006.282628

Cite this

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title = "Design of a micro-gripper and an ultrasonic manipulator for handling micron sized objects",

abstract = "This work reports on a system consisting of a MEMS (microelectromechanical system) gripper and an ultrasonic manipulator. The gripper is electrostatically actuated and includes an integrated force sensor measuring the gripping force. The device is monolithically fabricated using a silicon-on-insulator (SOI) fabrication process. The resolution of the force sensor is in the sub-micronewton range and, therefore, provides feedback of the forces that dominate the micromanipulation processes. A MEMS ultrasonic device is described which aligns small objects such as biological cells prior to manipulation with the gripper. The concept is demonstrated with polymer spheres, glass spheres and Hela cancer cells, thus providing a useful tool in micro-robotics and biological research.",

keywords = "Force feedback, Hela cells, Microgripper, Ultrasonic positioning",

author = "F. Beyeler and Bell, {D. J.} and Nelson, {B. J.} and Y. Sun and A. Neild and S. Oberti and J. Dual",

year = "2006",

doi = "10.1109/IROS.2006.282628",

language = "English",

isbn = "142440259X",

pages = "772--777",

booktitle = "2006 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2006",

note = "IEEE/RSJ International Conference on Intelligent Robots and Systems 2006, IROS 2006 ; Conference date: 09-10-2006 Through 15-10-2006",

url = "https://ieeexplore.ieee.org/xpl/conhome/4058334/proceeding",

}

Beyeler, F, Bell, DJ, Nelson, BJ, Sun, Y, Neild, A, Oberti, S & Dual, J 2006, Design of a micro-gripper and an ultrasonic manipulator for handling micron sized objects. in 2006 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2006. pp. 772-777, IEEE/RSJ International Conference on Intelligent Robots and Systems 2006, Beijing, China, 9/10/06. https://doi.org/10.1109/IROS.2006.282628

TY - GEN

T1 - Design of a micro-gripper and an ultrasonic manipulator for handling micron sized objects

AU - Beyeler, F.

AU - Bell, D. J.

AU - Nelson, B. J.

AU - Sun, Y.

AU - Neild, A.

AU - Oberti, S.

AU - Dual, J.

PY - 2006

Y1 - 2006

N2 - This work reports on a system consisting of a MEMS (microelectromechanical system) gripper and an ultrasonic manipulator. The gripper is electrostatically actuated and includes an integrated force sensor measuring the gripping force. The device is monolithically fabricated using a silicon-on-insulator (SOI) fabrication process. The resolution of the force sensor is in the sub-micronewton range and, therefore, provides feedback of the forces that dominate the micromanipulation processes. A MEMS ultrasonic device is described which aligns small objects such as biological cells prior to manipulation with the gripper. The concept is demonstrated with polymer spheres, glass spheres and Hela cancer cells, thus providing a useful tool in micro-robotics and biological research.

AB - This work reports on a system consisting of a MEMS (microelectromechanical system) gripper and an ultrasonic manipulator. The gripper is electrostatically actuated and includes an integrated force sensor measuring the gripping force. The device is monolithically fabricated using a silicon-on-insulator (SOI) fabrication process. The resolution of the force sensor is in the sub-micronewton range and, therefore, provides feedback of the forces that dominate the micromanipulation processes. A MEMS ultrasonic device is described which aligns small objects such as biological cells prior to manipulation with the gripper. The concept is demonstrated with polymer spheres, glass spheres and Hela cancer cells, thus providing a useful tool in micro-robotics and biological research.

KW - Force feedback

KW - Hela cells

KW - Microgripper

KW - Ultrasonic positioning

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U2 - 10.1109/IROS.2006.282628

DO - 10.1109/IROS.2006.282628

M3 - Conference Paper

AN - SCOPUS:34250636294

SN - 142440259X

SN - 9781424402595

SP - 772

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BT - 2006 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2006

T2 - IEEE/RSJ International Conference on Intelligent Robots and Systems 2006

Y2 - 9 October 2006 through 15 October 2006

ER -

Design of a micro-gripper and an ultrasonic manipulator for handling micron sized objects

Abstract

Conference

Keywords

UN SDGs

Access to Document

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Cite this