Design, modeling, and control of a micromachined nanopositioner with integrated electrothermal actuation and sensing

Yong Zhu, Ali Bazaei, Seyed Moheimani, Mehmet Yuce

Research output: Contribution to journal › Article › Research › peer-review

Original language	English
Pages (from-to)	711 - 719
Number of pages	9
Journal	Journal of Microelectromechanical Systems
Volume	20
Issue number	3
DOIs	https://doi.org/10.1109/JMEMS.2011.2140358
Publication status	Published - 2011
Externally published	Yes

Access to Document

@article{ad256a84e42c44cc8ee8231e8d4c6cc4,

title = "Design, modeling, and control of a micromachined nanopositioner with integrated electrothermal actuation and sensing",

author = "Yong Zhu and Ali Bazaei and Seyed Moheimani and Mehmet Yuce",

year = "2011",

doi = "10.1109/JMEMS.2011.2140358",

language = "English",

volume = "20",

pages = "711 -- 719",

journal = "Journal of Microelectromechanical Systems",

issn = "1057-7157",

publisher = "IEEE, Institute of Electrical and Electronics Engineers",

number = "3",

}

TY - JOUR

T1 - Design, modeling, and control of a micromachined nanopositioner with integrated electrothermal actuation and sensing

AU - Zhu, Yong

AU - Bazaei, Ali

AU - Moheimani, Seyed

AU - Yuce, Mehmet

PY - 2011

Y1 - 2011

UR - http://ieeexplore.ieee.org.ezproxy.lib.monash.edu.au/stamp/stamp.jsp?tp=&arnumber=5762583

U2 - 10.1109/JMEMS.2011.2140358

DO - 10.1109/JMEMS.2011.2140358

M3 - Article

VL - 20

SP - 711

EP - 719

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

SN - 1057-7157

IS - 3

ER -