Design, modeling, and control of a micromachined nanopositioner with integrated electrothermal actuation and sensing

Yong Zhu, Ali Bazaei, Seyed Moheimani, Mehmet Yuce

Research output: Contribution to journal › Article › Research › peer-review

Original language	English
Pages (from-to)	711 - 719
Number of pages	9
Journal	Journal of Microelectromechanical Systems
Volume	20
Issue number	3
DOIs	https://doi.org/10.1109/JMEMS.2011.2140358
Publication status	Published - 2011
Externally published	Yes

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AU - Bazaei, Ali

AU - Moheimani, Seyed

AU - Yuce, Mehmet

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