Design, modeling, and control of a micromachined nanopositioner with integrated electrothermal actuation and sensing

Yong Zhu, Ali Bazaei, Seyed Moheimani, Mehmet Yuce

Research output: Contribution to journalArticleResearchpeer-review

45 Citations (Scopus)
Original languageEnglish
Pages (from-to)711 - 719
Number of pages9
JournalJournal of Microelectromechanical Systems
Issue number3
Publication statusPublished - 2011
Externally publishedYes

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