Original language | English |
---|---|
Pages (from-to) | 711 - 719 |
Number of pages | 9 |
Journal | Journal of Microelectromechanical Systems |
Volume | 20 |
Issue number | 3 |
DOIs | |
Publication status | Published - 2011 |
Externally published | Yes |
Design, modeling, and control of a micromachined nanopositioner with integrated electrothermal actuation and sensing
Yong Zhu, Ali Bazaei, Seyed Moheimani, Mehmet Yuce
Research output: Contribution to journal › Article › Research › peer-review
43
Citations
(Scopus)