Design, modeling, and control of a micromachined nanopositioner with integrated electrothermal actuation and sensing

Yong Zhu, Ali Bazaei, Seyed Moheimani, Mehmet Yuce

Research output: Contribution to journalArticleResearchpeer-review

42 Citations (Scopus)
Original languageEnglish
Pages (from-to)711 - 719
Number of pages9
JournalJournal of Microelectromechanical Systems
Volume20
Issue number3
DOIs
Publication statusPublished - 2011
Externally publishedYes

Cite this