Design issues in a decoupled XY stage: static and dynamics modeling, hysteresis compensation, and tracking control

Yanding Qin, Bijan Shirinzadeh, Yanling Tian, Dawei Zhang

Research output: Contribution to journal › Article › Research › peer-review

114 Citations (Scopus)

Original language	English
Pages (from-to)	95 - 105
Number of pages	11
Journal	Sensors and Actuators A: Physical
Volume	194
DOIs	https://doi.org/10.1016/j.sna.2013.02.003
Publication status	Published - 2013

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AU - Qin, Yanding

AU - Shirinzadeh, Bijan

AU - Tian, Yanling

AU - Zhang, Dawei

PY - 2013

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JO - Sensors and Actuators A: Physical

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