Design issues in a decoupled XY stage: static and dynamics modeling, hysteresis compensation, and tracking control

Yanding Qin, Bijan Shirinzadeh, Yanling Tian, Dawei Zhang

Research output: Contribution to journalArticleResearchpeer-review

107 Citations (Scopus)
Original languageEnglish
Pages (from-to)95 - 105
Number of pages11
JournalSensors and Actuators, A: Physical
Volume194
DOIs
Publication statusPublished - 2013

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