@inproceedings{86d13a87408a4253bd74f8cefc689cd3,
title = "Design and testing of a 4-mm3 bidirectional linear microfin actuator",
author = "James Friend and Yasuyuki Gouda and Kentaro Nakamura and Sadayuki Ueha",
year = "2004",
language = "English",
isbn = "0780384121",
pages = "1302 -- 1305",
editor = "\{van der Steen\}, Ton and Steve Pilgrim and Walter Schulze and Chris Ekstrom",
booktitle = "Proceedings of the 2004 IEEE Ultrasonics Symposium",
publisher = "IEEE, Institute of Electrical and Electronics Engineers",
address = "United States of America",
note = "IEEE International Ultrasonics, Ferroelectrics and Frequency Control Symposium ; Conference date: 01-01-2004",
}