Design and fabrication of diffractive optical elements for optical tweezer arrays by means of e-beam lithography

Danut Adrian Cojoc, Enzo Di Fabrizio, Luca Businaro, Stefano Cabrini, Filippo Romanato, Lisa Vaccari, Matteo Altissimo

Research output: Contribution to journalArticleResearchpeer-review

33 Citations (Scopus)

Abstract

Optical tweezer arrays generated by diffractive optical elements can extend the capabilities to manipulate and organize microscopic particles into complex structures, to sort them intelligently and to study collective behavior in many-body systems materials. We describe new design methods, based on iterative algorithms, to calculate phase-only diffractive optical elements able to generate planar and three-dimensional arrays of tweezers. Experimental results showing the validity of the design approach are presented for an array of eight gaussian spots. (C) 2002 Published by Elsevier Science BY.
Original languageEnglish
Pages (from-to)963 - 969
Number of pages7
JournalMicroelectronic Engineering
Volume61-2
Publication statusPublished - 2002

Cite this