TY - JOUR
T1 - Design and evaluation of a dual-stage, compensated stick-slip actuator for long-range, precision compliant mechanisms
AU - Pinskier, Joshua
AU - Shirinzadeh, Bijan
AU - Al-Jodah, Ammar
N1 - Funding Information:
This work is supported by A ustralian Research Council (ARC) Linkage Infrastructure, Equipment and Facilities (LIEF) and Discovery grants.
Funding Information:
This work is supported by Australian Research Council (ARC) Linkage Infrastructure, Equipment and Facilities (LIEF) and Discovery grants.
Publisher Copyright:
© 2021 Elsevier B.V.
Copyright:
Copyright 2021 Elsevier B.V., All rights reserved.
PY - 2021/11/1
Y1 - 2021/11/1
N2 - Nanomanufacturing and nanoassembly require positioners capable of producing nanometer order precision with millimeter order workspaces. Current nanopositioners are based on compliant mechanisms or stick-slip/inertial drives. Compliant mechanisms give ultra-high precision but small workspaces, while inertial drives are bulky, expensive, and induce large transient errors making them unsuitable for tracking motions. A compliant stick-slip nanopositioner with error compensation was investigated in this research. The compliant design has a range of approximately 960 μm, is simple to manufacture and is suited to miniaturization. A serial error compensation stage was developed using model-predictive control, which is demonstrated to compensate for stick-slip errors and enable linear motion. Compared to the uncompensated design, root mean square tracking errors were reduced by 86% using the model-predictive control strategy. Hence enabling precise, and long-range tracking.
AB - Nanomanufacturing and nanoassembly require positioners capable of producing nanometer order precision with millimeter order workspaces. Current nanopositioners are based on compliant mechanisms or stick-slip/inertial drives. Compliant mechanisms give ultra-high precision but small workspaces, while inertial drives are bulky, expensive, and induce large transient errors making them unsuitable for tracking motions. A compliant stick-slip nanopositioner with error compensation was investigated in this research. The compliant design has a range of approximately 960 μm, is simple to manufacture and is suited to miniaturization. A serial error compensation stage was developed using model-predictive control, which is demonstrated to compensate for stick-slip errors and enable linear motion. Compared to the uncompensated design, root mean square tracking errors were reduced by 86% using the model-predictive control strategy. Hence enabling precise, and long-range tracking.
KW - Compliant mechanism
KW - Model-predictive control
KW - Nanopositioner
KW - Stick-slip actuator
UR - http://www.scopus.com/inward/record.url?scp=85111976677&partnerID=8YFLogxK
U2 - 10.1016/j.sna.2021.113007
DO - 10.1016/j.sna.2021.113007
M3 - Article
AN - SCOPUS:85111976677
SN - 0924-4247
VL - 331
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
M1 - 113007
ER -