Design and evaluation of a dual-stage, compensated stick-slip actuator for long-range, precision compliant mechanisms

Joshua Pinskier, Bijan Shirinzadeh, Ammar Al-Jodah

Research output: Contribution to journalArticleResearchpeer-review

15 Citations (Scopus)

Abstract

Nanomanufacturing and nanoassembly require positioners capable of producing nanometer order precision with millimeter order workspaces. Current nanopositioners are based on compliant mechanisms or stick-slip/inertial drives. Compliant mechanisms give ultra-high precision but small workspaces, while inertial drives are bulky, expensive, and induce large transient errors making them unsuitable for tracking motions. A compliant stick-slip nanopositioner with error compensation was investigated in this research. The compliant design has a range of approximately 960 μm, is simple to manufacture and is suited to miniaturization. A serial error compensation stage was developed using model-predictive control, which is demonstrated to compensate for stick-slip errors and enable linear motion. Compared to the uncompensated design, root mean square tracking errors were reduced by 86% using the model-predictive control strategy. Hence enabling precise, and long-range tracking.

Original languageEnglish
Article number113007
Number of pages10
JournalSensors and Actuators A: Physical
Volume331
DOIs
Publication statusPublished - 1 Nov 2021

Keywords

  • Compliant mechanism
  • Model-predictive control
  • Nanopositioner
  • Stick-slip actuator

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