Design and control methodology of a 3-DOF flexure-based mechanism for micro/nano-positioning

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95 Citations (Scopus)

Original language	English
Pages (from-to)	93 - 105
Number of pages	13
Journal	Robotics and Computer-Integrated Manufacturing
Volume	32
DOIs	https://doi.org/10.1016/j.rcim.2014.10.003
Publication status	Published - 2015

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@article{6cb6345557e94f9f9536a343029186e2,

title = "Design and control methodology of a 3-DOF flexure-based mechanism for micro/nano-positioning",

author = "Zhiyong Guo and Yanling Tian and Chunfeng Liu and Fujun Wang and Xianping Liu and Bijan Shirinzadeh and Dawei Zhang",

year = "2015",

doi = "10.1016/j.rcim.2014.10.003",

language = "English",

volume = "32",

pages = "93 -- 105",

journal = "Robotics and Computer-Integrated Manufacturing",

issn = "0736-5845",

publisher = "Elsevier",

}

TY - JOUR

T1 - Design and control methodology of a 3-DOF flexure-based mechanism for micro/nano-positioning

AU - Guo, Zhiyong

AU - Tian, Yanling

AU - Liu, Chunfeng

AU - Wang, Fujun

AU - Liu, Xianping

AU - Shirinzadeh, Bijan

AU - Zhang, Dawei

PY - 2015

Y1 - 2015

UR - http://goo.gl/aVNK2a

U2 - 10.1016/j.rcim.2014.10.003

DO - 10.1016/j.rcim.2014.10.003

M3 - Article

SN - 0736-5845

VL - 32

SP - 93

EP - 105

JO - Robotics and Computer-Integrated Manufacturing

JF - Robotics and Computer-Integrated Manufacturing

ER -