Design and analysis of a Piezo-based decoupled 3-DOF (XY?) micropositioner with large workspace

Tilok Kumar Das, Rifat Shahrear, Bijan Shirinzadeh

Research output: Chapter in Book/Report/Conference proceedingConference PaperOther


This paper presents a piezo-based compliant planer 3-DOF micropositioning stage for decoupled large workspace of the platform. Three piezoelectric actuators inside three double-stairs bridge-type mechanisms were used to drive the output platform in XY? directions. A-3PPR type kinematic chain has been oriented parallelly in such a way to have a rotational symmetry about the centroid. Two different types of prismatic flexure joints with a passive rotary flexure joint were utilized in each kinematic chain. The proposed design focused on the redundancy of the cross-axis coupling effect from the other axes during directional movements. To evaluate the performance, Finite Element Analysis (FEA) has been conducted. The decoupled 3-DOF micropositioning stage is able to maintain the maximum parasitic motion of 0.05% and 1.95 % in the Y and ? directions of their respective directional working range. So, the effect of cross-coupling motion during directional movement can be presumed to be less in this case. Further, the FEA results show that the micropositioning stage has a large work envelope of ±271.1 µm × 235 µm × ± 6.0352 mrad. Moreover, the evaluation of the dynamic characteristics predicts that out-of-plane motion will be less likely to occur. Thus, the 3-DOF micropositioning stage can provide a unidirectional decoupled large range of motions.

Original languageEnglish
Title of host publication2023 26th International Conference on Computer and Information Technology, ICCIT 2023
PublisherIEEE, Institute of Electrical and Electronics Engineers
ISBN (Electronic)9798350359015
Publication statusPublished - 2023
EventInternational Conference on Computer and Information Technology 2023 - Cox's Bazar, Bangladesh
Duration: 13 Dec 202315 Dec 2023
Conference number: 26th (Proceedings)


ConferenceInternational Conference on Computer and Information Technology 2023
Abbreviated titleICCIT 2023
CityCox's Bazar
Internet address


  • Compliant mechanism
  • Cross-coupling effect
  • Decoupling
  • Finite Element Analysis (FEA)
  • Planer motion

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