Design & optimization of a compact, large amplification XY flexure-mechanism

Joshua Pinskier, Bijan Shirinzadeh, Leon Clark

Research output: Chapter in Book/Report/Conference proceedingConference PaperOther

7 Citations (Scopus)

Abstract

This article presents the design methodology, optimization, and computational verification of a compact, high-gain planar XY flexure mechanism. The presented mechanism consists of a decoupled XY mechanism, and a modified Scott-Russel mechanism, which maintain linear XY motion, and amplify the input piezoelectric actuator (PEA) displacement respectively. Each mechanism offers the potential for use in isolation. When operated together, the combined mechanism is capable of nanometer scale precision and millimeter scale range in a vacuum-compatible design. The presented mechanism could therefore be used in micro-assembly operations including those performed in electron microscopes. The design methodology and mechanism models are presented, with the selected design computationally optimized and analyzed. By using a broad design space, and minimizing assumptions, the optimized mechanism produces workspace of approximately 930 × 940 μm2 from 15 μm of input displacement.

Original languageEnglish
Title of host publicationInternational Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017 - Proceedings
EditorsSinan Haliyo, Sylvain Martel, Sergej Fatikow
PublisherIEEE, Institute of Electrical and Electronics Engineers
ISBN (Electronic)9781538603468
DOIs
Publication statusPublished - 3 Aug 2017
EventInternational Conference on Manipulation, Automation and Robotics at Small Scales 2017 - Montreal, Canada
Duration: 17 Jul 201721 Jul 2017
Conference number: 1st

Publication series

NameInternational Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017 - Proceedings

Conference

ConferenceInternational Conference on Manipulation, Automation and Robotics at Small Scales 2017
Abbreviated titleMARSS 2017
CountryCanada
CityMontreal
Period17/07/1721/07/17

Keywords

  • Flexure-Mechanism
  • Micromanipulation
  • Piezo-actuation

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