Depth sectioning using electron energy loss spectroscopy

Adrian D'Alfonso, E Cosgriff, Scott Findlay, A Kirkland, Peter Nellist, M Oxley, Leslie Allen

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

Abstract

The continued development of electron probe aberration correctors for scanning transmission electron microscopy has enabled finer electron probes, allowing atomic resolution column-by-column electron energy loss spectroscopy. Finer electron probes have also led to a decrease in the probe depth of focus, facilitating optical slicing or depth sectioning of samples. The inclusion of post specimen aberration corrected image forming lenses allows for scanning confocal electron microscopy with further improved depth resolution and selectivity.
Original languageEnglish
Title of host publicationJournal of Physics: Conference Series
EditorsPaul D Brown
Place of PublicationUK
PublisherIOP Publishing
Pages1 - 4
Number of pages4
Volume126
ISBN (Print)1742-6596
DOIs
Publication statusPublished - 2008
Externally publishedYes
EventInstitute-of-Physics-Electron-Microscopy and Analysis-Group Conference (EMAG) 2008 - Glasgow Scotland, Glasgow Scotland, United Kingdom
Duration: 1 Jan 2008 → …

Conference

ConferenceInstitute-of-Physics-Electron-Microscopy and Analysis-Group Conference (EMAG) 2008
Abbreviated titleEMAG 2008
CountryUnited Kingdom
CityGlasgow Scotland
Period1/01/08 → …

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