Dense arrays of uniform submicron pores in silicon and their applications

Daniel Brodoceanu; Roey Elnathan; Beatriz Prieto-Simón; Bahman Delalat; Taryn Guinan; Elmar  Kroner; Nicolas H. Voelcker; Tobias Kraus

doi:10.1021/am506891d

Dense arrays of uniform submicron pores in silicon and their applications

Daniel Brodoceanu, Roey Elnathan, Beatriz Prieto-Simón, Bahman Delalat, Taryn Guinan, Elmar Kroner, Nicolas H. Voelcker, Tobias Kraus

Research output: Contribution to journal › Article › Research › peer-review

49 Citations (Scopus)

Abstract

We report a versatile particle-based route to dense arrays of parallel submicron pores with high aspect ratio in silicon and explore the application of these arrays in sensors, optics, and polymer micropatterning. Polystyrene (PS) spheres are convectively assembled on gold-coated silicon wafers and sputter-etched, resulting in well-defined gold disc arrays with excellent long-range order. The gold discs act as catalysts in metal-assisted chemical etching, yielding uniform pores with straight walls, flat bottoms, and high aspect ratio. The resulting pore arrays can be used as robust antireflective surfaces, in biosensing applications, and as templates for polymer replica molding.

Original language	English
Pages (from-to)	1160-1169
Number of pages	10
Journal	ACS Applied Materials & Interfaces
Volume	7
Issue number	2
DOIs	https://doi.org/10.1021/am506891d
Publication status	Published - 21 Jan 2015
Externally published	Yes

Keywords

Antireflective surfaces
Colloidal lithography
Metal-assisted chemical etching
Polymer fiber arrays
Porous silicon
SALDI substrates

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10.1021/am506891d

Cite this

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AU - Brodoceanu, Daniel

AU - Elnathan, Roey

AU - Prieto-Simón, Beatriz

AU - Delalat, Bahman

AU - Guinan, Taryn

AU - Kroner, Elmar

AU - Voelcker, Nicolas H.

AU - Kraus, Tobias

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Dense arrays of uniform submicron pores in silicon and their applications

Abstract

Keywords

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