Defect cluster segmentation for CMOS fabricated wafers

Wey Jean Tee; Melanie Ooi; Ye Chow Kuang; Chris Chan

Defect cluster segmentation for CMOS fabricated wafers

Wey Jean Tee
, Melanie Ooi
, Ye Chow Kuang
, Chris Chan

Malaysia School of Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

Original language	English
Title of host publication	Proceedings of the 2009 Conference on Innovative Technologies in Intelligent Systems and Industrial Applications (CITISIA 2009)
Editors	S M Namal Arosha Senanayake, Tan Chin Seong, Khoo Boon How
Place of Publication	Selangor Malaysia
Publisher	IEEE, Institute of Electrical and Electronics Engineers
Pages	134 - 138
Number of pages	5
Volume	1
ISBN (Print)	9781424428878
Publication status	Published - 2009
Event	IEEE Conference on Innovative Technologies in Intelligent Systems and Industrial Applications 2009 - Kuala Lumpur, Malaysia Duration: 25 Jul 2009 → 26 Jul 2009 https://ieeexplore.ieee.org/xpl/conhome/5210013/proceeding (Proceedings)

Conference

Conference	IEEE Conference on Innovative Technologies in Intelligent Systems and Industrial Applications 2009
Abbreviated title	CITISIA 2009
Country/Territory	Malaysia
City	Kuala Lumpur
Period	25/07/09 → 26/07/09
Internet address	https://ieeexplore.ieee.org/xpl/conhome/5210013/proceeding (Proceedings)

Cite this

Tee, W. J., Ooi, M., Kuang, Y. C., & Chan, C. (2009). Defect cluster segmentation for CMOS fabricated wafers. In S. M. Namal Arosha Senanayake, T. C. Seong, & K. B. How (Eds.), Proceedings of the 2009 Conference on Innovative Technologies in Intelligent Systems and Industrial Applications (CITISIA 2009) (Vol. 1, pp. 134 - 138). IEEE, Institute of Electrical and Electronics Engineers.

Tee, Wey Jean ; Ooi, Melanie ; Kuang, Ye Chow et al. / Defect cluster segmentation for CMOS fabricated wafers. Proceedings of the 2009 Conference on Innovative Technologies in Intelligent Systems and Industrial Applications (CITISIA 2009). editor / S M Namal Arosha Senanayake ; Tan Chin Seong ; Khoo Boon How. Vol. 1 Selangor Malaysia : IEEE, Institute of Electrical and Electronics Engineers, 2009. pp. 134 - 138

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title = "Defect cluster segmentation for CMOS fabricated wafers",

author = "Tee, \{Wey Jean\} and Melanie Ooi and Kuang, \{Ye Chow\} and Chris Chan",

year = "2009",

language = "English",

isbn = "9781424428878",

volume = "1",

pages = "134 -- 138",

editor = "\{Namal Arosha Senanayake\}, \{S M\} and Seong, \{Tan Chin\} and How, \{Khoo Boon\}",

booktitle = "Proceedings of the 2009 Conference on Innovative Technologies in Intelligent Systems and Industrial Applications (CITISIA 2009)",

publisher = "IEEE, Institute of Electrical and Electronics Engineers",

address = "United States of America",

note = "IEEE Conference on Innovative Technologies in Intelligent Systems and Industrial Applications 2009, CITISIA 2009 ; Conference date: 25-07-2009 Through 26-07-2009",

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Tee, WJ, Ooi, M, Kuang, YC & Chan, C 2009, Defect cluster segmentation for CMOS fabricated wafers. in SM Namal Arosha Senanayake, TC Seong & KB How (eds), Proceedings of the 2009 Conference on Innovative Technologies in Intelligent Systems and Industrial Applications (CITISIA 2009). vol. 1, IEEE, Institute of Electrical and Electronics Engineers, Selangor Malaysia, pp. 134 - 138, IEEE Conference on Innovative Technologies in Intelligent Systems and Industrial Applications 2009, Kuala Lumpur, Malaysia, 25/07/09.

Defect cluster segmentation for CMOS fabricated wafers. / Tee, Wey Jean; Ooi, Melanie; Kuang, Ye Chow et al.
Proceedings of the 2009 Conference on Innovative Technologies in Intelligent Systems and Industrial Applications (CITISIA 2009). ed. / S M Namal Arosha Senanayake; Tan Chin Seong; Khoo Boon How. Vol. 1 Selangor Malaysia: IEEE, Institute of Electrical and Electronics Engineers, 2009. p. 134 - 138.

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

TY - GEN

T1 - Defect cluster segmentation for CMOS fabricated wafers

AU - Tee, Wey Jean

AU - Ooi, Melanie

AU - Kuang, Ye Chow

AU - Chan, Chris

PY - 2009

Y1 - 2009

M3 - Conference Paper

SN - 9781424428878

VL - 1

SP - 134

EP - 138

BT - Proceedings of the 2009 Conference on Innovative Technologies in Intelligent Systems and Industrial Applications (CITISIA 2009)

A2 - Namal Arosha Senanayake, S M

A2 - Seong, Tan Chin

A2 - How, Khoo Boon

PB - IEEE, Institute of Electrical and Electronics Engineers

CY - Selangor Malaysia

T2 - IEEE Conference on Innovative Technologies in Intelligent Systems and Industrial Applications 2009

Y2 - 25 July 2009 through 26 July 2009

ER -

Tee WJ, Ooi M, Kuang YC, Chan C. Defect cluster segmentation for CMOS fabricated wafers. In Namal Arosha Senanayake SM, Seong TC, How KB, editors, Proceedings of the 2009 Conference on Innovative Technologies in Intelligent Systems and Industrial Applications (CITISIA 2009). Vol. 1. Selangor Malaysia: IEEE, Institute of Electrical and Electronics Engineers. 2009. p. 134 - 138