Defect cluster segmentation for CMOS fabricated wafers

Wey Jean Tee, Melanie Ooi, Ye Chow Kuang, Chris Chan

    Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

    6 Citations (Scopus)
    Original languageEnglish
    Title of host publicationProceedings of the 2009 Conference on Innovative Technologies in Intelligent Systems and Industrial Applications (CITISIA 2009)
    EditorsS M Namal Arosha Senanayake, Tan Chin Seong, Khoo Boon How
    Place of PublicationSelangor Malaysia
    PublisherIEEE, Institute of Electrical and Electronics Engineers
    Pages134 - 138
    Number of pages5
    Volume1
    ISBN (Print)9781424428878
    Publication statusPublished - 2009
    EventIEEE Conference on Innovative Technologies in Intelligent Systems and Industrial Applications (CITISIA) - Selangor Malaysia, Selangor Malaysia
    Duration: 1 Jan 2009 → …

    Conference

    ConferenceIEEE Conference on Innovative Technologies in Intelligent Systems and Industrial Applications (CITISIA)
    CitySelangor Malaysia
    Period1/01/09 → …

    Cite this