Defect cluster recognition system for fabricated semiconductor wafers

Melanie Po-Leen Ooi, Hong Kuan Sok, Ye Chow Kuang, Serge Demidenko, Chris Chan

    Research output: Contribution to journalArticleResearchpeer-review

    31 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)1029 - 1043
    Number of pages15
    JournalEngineering Applications of Artificial Intelligence
    Volume26
    Issue number3
    DOIs
    Publication statusPublished - 2013

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