Correlation of contact resistance with microstructure for Au/Ni/Al/Ti/AlGaN/GaN ohmic contacts using transmission electron microscopy

Alex N Bright, Paul J Thomas, Matthew Weyland, Dave M Tricker, Colin J Humphreys, Richard Davies

Research output: Contribution to journal › Article › Research › peer-review

164 Citations (Scopus)

Abstract

DOI: 10.1063/1.1347003

@article{095de497d6f747b88f69b4858c024c04,

title = "Correlation of contact resistance with microstructure for Au/Ni/Al/Ti/AlGaN/GaN ohmic contacts using transmission electron microscopy",

abstract = "DOI: 10.1063/1.1347003",

author = "Bright, \{Alex N\} and Thomas, \{Paul J\} and Matthew Weyland and Tricker, \{Dave M\} and Humphreys, \{Colin J\} and Richard Davies",

year = "2001",

language = "English",

volume = "89",

pages = "3143 -- 3450",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "6",

}

TY - JOUR

T1 - Correlation of contact resistance with microstructure for Au/Ni/Al/Ti/AlGaN/GaN ohmic contacts using transmission electron microscopy

AU - Bright, Alex N

AU - Thomas, Paul J

AU - Weyland, Matthew

AU - Tricker, Dave M

AU - Humphreys, Colin J

AU - Davies, Richard

PY - 2001

Y1 - 2001

N2 - DOI: 10.1063/1.1347003

AB - DOI: 10.1063/1.1347003

UR - https://www.scopus.com/pages/publications/0035868111

M3 - Article

SN - 0021-8979

VL - 89

SP - 3143

EP - 3450

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 6

ER -