Correlation of contact resistance with microstructure for Au/Ni/Al/Ti/AlGaN/GaN ohmic contacts using transmission electron microscopy

Alex N Bright, Paul J Thomas, Matthew Weyland, Dave M Tricker, Colin J Humphreys, Richard Davies

Research output: Contribution to journalArticleResearchpeer-review

134 Citations (Scopus)

Abstract

DOI: 10.1063/1.1347003
Original languageEnglish
Pages (from-to)3143 - 3450
Number of pages308
JournalJournal of Applied Physics
Volume89
Issue number6
Publication statusPublished - 2001
Externally publishedYes

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