Conventional and back-side focused ion beam milling for off-axis electron holography of electrostatic potentials in transistors

Rafal E Dunin-Borkowski, Simon B Newcomb, Takeshi Kasama, Martha R McCartney, Matthew Weyland, Paul A Midgley

Research output: Contribution to journalArticleResearchpeer-review

40 Citations (Scopus)

Abstract

DOI: 10.1016/j.ultramic.2004.11.018
Original languageEnglish
Pages (from-to)67 - 81
Number of pages15
JournalUltramicroscopy
Volume103
Issue number1
Publication statusPublished - 2005

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