Abstract
We demonstrate that InAs and InGaAs quantum dots can be grown selectively in specific regions of GaAs substrates using selective-area MOCVD. Growth parameters can be controlled to obtain high density (∼1010/ cm2) of defect free quantum dots. Emission spectra from these selectively grown dots are presented and are comparable in linewidth to that from dots grown on unpatterned substrates. We propose that this growth scheme can be used for fabrication of quantum dot lasers integrated with waveguides.
| Original language | English |
|---|---|
| Title of host publication | 2005 5th IEEE Conference on Nanotechnology |
| Publisher | IEEE, Institute of Electrical and Electronics Engineers |
| Pages | 593-595 |
| Number of pages | 3 |
| ISBN (Print) | 0780391993, 9780780391994 |
| DOIs | |
| Publication status | Published - 1 Dec 2005 |
| Externally published | Yes |
| Event | IEEE International Conference on Nanotechnology 2005 - Nagoya, Japan Duration: 11 Jul 2005 → 15 Jul 2005 Conference number: 5th https://ieeexplore.ieee.org/xpl/conhome/10038/proceeding (Proceedings) |
Conference
| Conference | IEEE International Conference on Nanotechnology 2005 |
|---|---|
| Abbreviated title | IEEE-NANO 2005 |
| Country/Territory | Japan |
| City | Nagoya |
| Period | 11/07/05 → 15/07/05 |
| Internet address |
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Keywords
- Integrated optoelectronic devices
- Quantum dots
- Selective area epitaxy
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