@inproceedings{62a45b714efa410193156672e878bc51,
title = "Constraint programming for improved wafer fabrication throughput",
author = "Mark Wallace and Carlos Eisenberg",
year = "2005",
language = "English",
isbn = "9810541945",
pages = "169 -- 174",
editor = "P Lendermann",
booktitle = "Proceedings of the 3rd International Conference on Modeling and Analysis of Semiconductor Manufacturing",
publisher = "Singapore Institute of Manufacturing Technology (SIMTech)",
note = "International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM) ; Conference date: 01-01-2005",
}