Columnar structure in porous silicon: Influence of etching time on pore dynamics and ordering

Andrei Nikulin, Daniele Pelliccia, V Starkov, Osami Sakata

    Research output: Contribution to journalArticleOtherpeer-review

    3 Citations (Scopus)

    Abstract

    Applications of porous silicon are ranging from drug delivery vehicles to micro fuel cells. The size of the pores and their distribution plays critical role in the final properties of the devices manufactured on their base. We performed nondestructive quantitative experimental studies of selected porous silicon samples with gradient porosity. We were able to determine the average size of the pores and its dynamics as a function of the etching time. We also were able to determine the statistical parameters of the pore formation.
    Original languageEnglish
    Pages (from-to)1 - 3
    Number of pages3
    JournalJournal of Applied Physics
    Volume109
    Issue number7
    DOIs
    Publication statusPublished - 2011

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